MP105-3 Miniature XYZ Positioning System, Cartesian (Cleanroom ISO 4) | Travel 30–50 × 50 × 50 mm | Repeatability ±0.2 µm, Speed 75 mm/s
XYZ Positioning Stages – compact stacked

782300:206.26

Miniaturized XYZ Micropositioner

The miniaturized XYZ micropositioner is a high-precision 3-axis system for linear motion in X, Y, and Z within an extremely small footprint. It was specifically developed for active alignment processes and high-accuracy adjustment tasks in optics, photonics, and semiconductor technology. The system enables ultra-fine positioning in the sub-micrometer and nanometer range and is ideally suited for precise alignment and scanning tasks.

Linear motion in X, Y, and Z for precise active alignment

Travels from 30–50 mm per axis in a compact design (155 × 155 × 195 mm)

Repeatability up to ±0.2 µm (optional down to 0.005 µm)

Maximum stiffness achieved by crossed-roller guides, optionally full ceramic

Options:

Versions for vacuum (10E-11 mbar), cleanroom (ISO 4), radiation (EUV)
One to three large motors, depending on the application
Motor variants: piezo motor for maximum resolution or Nanomotion for dynamic applications
High-resolution measurement systems for repeatability up to 0.005 µm
Combinable with rotary stages for additional rotational degrees of freedom
Magnetic, low-magnetic, or non-magnetic versions
Customer-specific development for the complete application

Application Fields

Active alignment in optics and photonics manufacturing, high-precision positioning in semiconductor technology, alignment of optics, lasers, cameras, and sensors, wafer and substrate alignment, vacuum microscopy, EUV and beamline applications, material analysis and materials research, sample handling and scanning, research & development, miniaturization of high-precision positioning systems

Specifications

MP105-3		-50/50/30-2PM-L	-50/50/50-PM-L	50/50/30-2LM-L	-50/50/50-LM-L	50/50/30-2XLM-L	50/50/30-XLM-L
Travel X	[mm]	50	50	50	50	50	50
Travel Y	[mm]	50	50	50	50	50	50
Travel Z	[mm]	30	50	30	50	30	50
Repeatability unidirectional	[µm]	± 0.2	± 0.2	± 0.4	± 0.4	± 0.4	± 0.4
Repeatability bidirectional	[µm]	± 0.3	± 0.3	± 0.5	± 0.5	± 0.5	± 0.5
Positioning speed	[mm/s]	5	5	50	50	50	50
Max. speed	[mm/s]	7.5	7.5	75	75	75	75
Max. load Fx	[N]	10	10	12	12	12	12
Max. load Fy	[N]	10	10	12	12	12	12
Max. load Fz	[N]	20	10	24	12	43	24
Number of motors		2	1	2	1	2	1
Motor		Piezo motor	Piezo motor	Nanomotion
Feedback		Linear scale
Resolution measuring system		0.1 µm, optional up to 0.005 µm or without measuring system
Guide		Cross roller
Length	[mm]	155
Width	[mm]	155
Height	[mm]	195
Optional Features		High-resolution measurement systems for repeatability down to 0.005 µm, combinable with rotary stages for additional rotational degrees of freedom, customer-specific development for the complete application including housing, purge air preparation, brake, customer-specific adapters, hole patterns, cables, and connectors
Variants cleanroom		up to cleanroom class ISO 4 (higher on request)
Variants beam		UV, DUV, EUV (X-ray, gamma on request)
Variants magnetism		magnetic \| low-magnetic \| magnet-free
Variants vacuum		all ranges up to 10E-11 mbar HV / UHV