MP700-3 Flat 3D Aligner | XYRz linear motor, air bearing | Aperture 730 mm | Load 28 kg | Travel 5 x 5 mm x 5°
XY Theta Stage

782459:003.26

Parallel kinematic 3D aligner with large aperture

With this aligner, second translational motions of ± 5 mm in the plane and a rotation around the vertical of ± 3° are realized. The motion R (Theta) is the result of the XY combination of axes. The aligner is designed for loads up to 28 kg.

Ideal for high-precision alignment of large substrates, masks, frames

Suitable for large samples with an aperture of 730 x 730 mm

High repeatability up to 0.4 µm / ± 0.0002° for loads up to 28 kg

Ultra flat design of 990 x 1090 x 225 mm

Low-maintenance and low-particle by air bearing and direct drive

Options:

Adaptation to the process: aperture, holder, feeder, extension of Z-Motion
Configuration for clean room ISO 14644-1 up to class 5 (higher on request)
Individual design with rack, vibration isolation, enclosure
Individual solution development with 3D design for the positioning task

Individual extensions and customizations

Engineering services include the fitting of the systems to your structure and the desired motion control or the completely individual solution development with 3D design for the application-specific positioning task.

Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests

Fields of application

Positioning of large substrates, masks, frames, screens, printing plates in a low-particle environment, semiconductor printers for applying layer components, UV printers, semiconductor inspection, semiconductor alignment, alignment of samples, analysis, incident and transmitted light measurements, transfer measurements

Specifications

782459:003.26		X	Y	Rz
Travel	[mm; deg]	± 5	± 5	± 3
Repeatability unidirectional	[µm; deg]	± 0.4	± 0.4	± 0.0002
Repeatability bidirectional	[µm; deg]	± 0.7	± 0.7	± 0.0003
Positioning speed	[mm/s; deg/s]	50	50	10
Max. speed	[mm/s; deg/s]	100	100	20
Max. Load	[N]	5	5	100
Weight	[kg]	63
Length x width x height	[mm]	990 x 1090 x 225
Aperture		730 x 730
Guide		Air Bearing	Air Bearing	Air Bearing
Motor		Ironless Dynamic Linear Motor	Ironless Dynamic Linear Motor	Ironless Dynamic Linear Motor
Feedback		Linear Encoder	Linear Encoder	Linear Encoder
Material		Anodized Aluminum
Variants clean room		up to clean room class ISO 5 (higher on request)
Variants beam		UV
Variants magnetism		magnetic

Controllers

ACS

We support integration of our systems into your ACS environment

PLC

We support integration of our systems into PLC architectures, e.g. Beckhoff

Related Products

Compact 3D mask aligner for SMT semiconductor printing / lithography | XY Phi positioning system (cleanroom, UV) for 650 x 650 mm / GEN 3

MP410-3 High Vacuum Aligner up to 10E-6 mbar | XYRz stepper motor, ball screw | Load 5 kg | Stroke 15 x 15 x 5°

6-axis miniature XYZ-Theta-Phi-Delta positioning system (clean room ISO 5) | Tripod, Rotary Stage, XY- Stage, Hexapod Alternative | Travel XYZ 30 x 30 x 20 mm, RxRy 4°, Rz 360°

Almost all atmospheric multi-axis combinations are unanodized with UHV lubrication for residual pressures up to 10-6 mbar and min. cleanroom class ISO 6 - or even better - available. Further stages for more demanding environments up to cleanroom class ISO 2, vacuum up to 10E-11 mbar or hard radiation you will find here:

Overview Clean Room & Vacuum Stages Get in touch with our technical consultant

Steinmeyer Mechatronik GmbH mainly uses aluminum for the structure of custom axis combinations, because it efficiently dissipates local heat and quickly reaches a thermally stable state. This is a prerequisite for stable, precise systems. The lower stiffness of aluminum compared to steel is compensated by a slightly higher height of the stages or the use of hollow profiles. Note: An aluminum beam and a steel beam sag equally under their own weight!
In special cases, titanium is also used for magnet-free systems.

What surfaces are available?

Various surface options are available. Depending on the application, anodized and cleaned, alternative colors, aluminum cleaned and bare, bilatal or nickel are available for optimal process suitability (e.g. particularly high degrees of purity, resistance to cleaning with chemicals in the field of life science). Special surfaces are often necessary for UV, DUV or EUV (X-ray, gamma on request).

Depending on the requirements, various drive systems can be used. This can be recognized as an abbreviation in the name below:

Ground ball screws or lead screws with SM (stepper motor), DC motor or AC servo.
Electrodynamic linear motors (ironless or iron-core).
Piezomotors such as Piezo-Legs^® or Nanomotion^®.

Incremental scales made of steel or Zerodur^® or Zeromet^® are used as a feedback system in most cases. While this is sufficient for accuracy in the single-digit micrometer range, it makes sense to use interferometric position feedback for accuracy requirements below one micrometer. In systems with “open loop”, i.e. without a measuring system, only precision in the double-digit micrometer range can be achieved; however, due to the simpler controller and the lack of a measuring system, this is the more cost-effective solution.