XYZ inspection portal | XY linear motor, profile rail | Z ball screw, DC motor | Pitch 720 x 720 x 100 mm

XYZ inspection portal | XY linear motor, profile rail | Z ball screw, DC motor | Pitch 720 x 720 x 100 mm - Portals


High-precision quality inspection for cleanroom applications

This inspection system (shown here without cover) is specially designed for automated quality assurance. The positioning system allows positioning along two linear axes. A high-resolution camera or sensor is moved relative to the sample to inspect geometries, perform measurements and document special quality features. The system is controlled by a separate motion controller for three axes.

Automated and low-maintenance 24/7 inspection

  • Simultaneous inspection by travels up to 720 mm
  • Reduced cycle time with speeds up to 150 mm/s and accelerations of 2 m/s2
  • Precise measurement results and enormous quality improvements with repeatability up to 1 µm
  • Low-maintenance 24/7 operation and flexible maintenance concept due to fast system exchange on the granite structure

Optionally expandable:

  • Various travels up to 720 mm
  • Version for clean room ISO 14644-1 class 2 (up to class 1 on request)
  • Optionally with motorized Z-axis
  • Connections for dust extraction and rotating belt covers
  • With/without frame and base plate made of granite or aluminum
  • Integration into the customer specific application
  • Immediate use with pre-configured controller incl. exemplary software

    Individual extensions and customizations

    Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests


    Fields of application

    Automated Inspection in clean rooms e.g. 300 mm large wafers, probe cards and printed circuit boards, AOI, quality assurance, microscopy of large sample, surface inspection, measurement of chip, measurement of objects on complicated geometric shapes







    Standard system used PMT290-EDLMPMT290-EDLM 

    [mm; deg]

    Repeatability unidirectional

    [µm; deg]

    ± 0.3± 0.3± 1.5
    Repeatability bidirectional

    [µm; deg]

    ± 0.4± 0.7± 2.5
    Positioning speed

    [mm/s; deg/s]

    Max. speed[mm/s; deg/s]15001500300
    Max. Load


    150150± 200



    Ironless Dynamic Linear Motor

    Ironless Dynamic Linear Motor

     AC Servo




     Ball Screw



    Linear Scale

    Linear ScaleMotor Encoder


    Your customized system

    Are you looking for a technical solution for your application?

    Get your first 3D Design in a few days:


    Elger Matthes
    Development, Consulting, Concepts, Innovationn

    T +49 (0) 351 88585-0

    Nadine Strudel
    Consulting International

    T +49 (0) 351 88585-44


    Our references