MP700-3 Flat 3D Aligner | XYRz linear motor, air bearing | Aperture 730 mm | Load 28 kg | Travel 5 x 5 mm x 5°
Compact Multi Axis Stages
782459:003.26
Parallel kinematic 3D aligner with large aperture
With this aligner, second translational motions of ± 5 mm in the plane and a rotation around the vertical of ± 3° are realized. The motion R (Phi) is the result of the XY combination of axes. The aligner is designed for loads up to 28 kg.
|
|
|
|
|
Options:
|
Individual extensions and customizations
Engineering services include the fitting of the systems to your structure and the desired motion control or the completely individual solution development with 3D design for the application-specific positioning task.
Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests
Fields of application
Positioning of large substrates, masks, frames, screens, printing plates in a low-particle environment, semiconductor printers for applying layer components, UV printers, semiconductor inspection, semiconductor alignment, alignment of samples, analysis, incident and transmitted light measurements, transfer measurements
| 782459:003.26 | X | Y | Rz | |
| Travel | [mm; deg] | ± 5 | ± 5 | ± 3 |
| Repeatability unidirectional | [µm; deg] | ± 0.4 | ± 0.4 | ± 0.0002 |
| Repeatability bidirectional | [µm; deg] | ± 0.7 | ± 0.7 | ± 0.0003 |
| Positioning speed | [mm/s; deg/s] | 50 | 50 | 10 |
| Max. speed | [mm/s; deg/s] | 100 | 100 | 20 |
| Max. Load | [N] | 5 | 5 | 100 |
| Weight | [kg] | 63 | ||
| Length x width x height | [mm] | 990 x 1090 x 225 | ||
| Aperture | 730 x 730 | |||
| Guide | Air Bearing | Air Bearing | Air Bearing | |
| Motor | Ironless Dynamic Linear Motor | Ironless Dynamic Linear Motor | Ironless Dynamic Linear Motor | |
| Feedback | Linear Encoder | Linear Encoder | Linear Encoder | |
| Material | Anodized Aluminum | |||
| Variants clean room | up to clean room class ISO 1 (on request) | |||
| Variants beam | UV | |||
| Variants magnetism | magnetic | |||
