MP200-3 Miniature Z-Phi Delta Positioning System, Tripod | Stepper Motor, Lead Screw | Travel 2 mm x 1.5° x 1.5°
Compact Multi Axis Stages

782497:008.26

Tripod with aperture

As a addition to the MP200-5 aligner, which allows adjustment in five degrees of freedom, this aligner was designed with three degrees of freedom. It consists internally of three vertically acting precision axes, which are connected to the movable load plate by means of solid joints. Thus, the load plate can be tilted in two axes and also adjusted in height.

Ideal for optical and active alignment

Easy motion controll: individual or parallel

Good price-performance ratio and very long lifetime

Options:

Rotation around the main axis with an additional rotary stage
Various, high-resolution measuring systems
Extended travel range in XY direction
Configuration for clean room up to ISO class 4, laboratory or production
Customized development with 3D design, prototypes, series production

Use in wafer inspection and for high-precision assembly tasks

Since alignment of workpieces is often sufficient, vertical adjustment can be used to compensate for lens packages of different heights, especially in optics assembly. In addition, a 5-axis manipulator with a large travel range in XY can be realized from this manipulator and a cross-transmitted light table or cross table. For example, the KDT310, KT310 or KDT235 can be used as XY systems.

Specifications

MP200-3		Z	Rx	Ry
Standard System		MT63-DC	MT63-DC	MT63-DC
Travel	[mm]	4	3	3
Repeatability unidirectional	[µm]	± 0.5	± 0.00005	± 0.00005
Repeatability bidirectional	[µm]	± 2.5	± 0.00020	± 0.00020
Positioning speed	[mm/s]	1	0.8	0.8
Max. speed	[mm/s]	1.8	1.5	1.5
Max. Load	[N]	20
Length x width x height	[mm]	200 x 200 x 80
Aperture	[mm]	Ø 45
Weight	[kg]	6.5
Drive		Lead Screw, Belt	Lead Screw, Belt	Lead Screw, Belt
Screw type		M5x0,5	M5x0,5	M5x0,5
Lead		0.5	0.5	0.5
Motor		DC-Motor	DC-Motor	DC-Motor
Feedback		Motor Encoder	Motor Encoder	Motor Encoder
Resolution Measuring System		0.1 µm (optional up to 0.001 µm)
Material		Anodized Aluminum
Optional features		Rotary stage, sample holder, calibreless energy supply for unlimited rotation
Variants clean room		up to cleanroom class ISO 4 (higher on request)
Variants beam		UV, DUV (EUV, X-ray, gamma on request)
Variants magnetism		magnetic (low-magnetic on request)
Variants vacuum		up to 10E-6 mbar (higher on request)