LA80
Vacuum / Cleanroom compact multi axes systems & aligner

782475:038.26, 782475:049.26
LA80 - Vacuum / Cleanroom compact multi axes systems & aligner

 

High Speed Stage

HV 10E-9 mbar, EUV, ISO 4 | Travel up to 500 mm | Rep 0.4 µm | Load 5 kg | Speed 100 mm/s

  • Cleanroom: variants up to class ISO 6 (higher on request)
  • Vacuum: UHV, lubrication liquid up to 10-8 / dry up to 10-9 mbar
  • Lifetime in the kilometer range despite dry lubrication
  • Max. Bakeout temperature: 120°C
  • Available as magnetic version
Optionally configurable:
  • Optionally with and without measuring system
  • Material selection and vacuum lubrication adapted to the application
  • Can be combined to a fast XYZ transfer system (e.g. LA90, LA95, LA170)
  • Individual adaptation to the installation situation in the chamber
  • Versions for clean room ISO 14644-1 (up to class 1 on request)
  • Optional with Controller FMC400/450

Long lifetime despite dry running

This linear axis is used as a powerful component for multi-axis systems and for highly dynamic transfer systems. It enables fast positioning with extremely high resolution in ultra-high vacuum, even in the vertical direction. A ball screw ensures high stiffness and standstill stability at high speed. The system does not require liquid lubricants and still offers lifetime in the range of many kilometers.
 

Fields of application

High-precision transfer systems in ultra-high vacuum under extreme ultraviolet radiation, semiconductor fabrication, beam shaping for exposure processes, surface analysis and sensor positioning, mass spectrometry, OLED coating processes, layer thickness measurement and layer rate measurement, surface coating (sputtering, vapor deposition), beam exits, experimental setups, sensor arrays for investigations of samples close to their native state

References

OMNY—A tOMography Nano crYo stage | Review of Scientific Instruments 89, 043706 (2018) | https://doi.org/10.1063/1.5020247

 

LA80   -200-SM -200-SM-L -500-SM -500-SM-L
Travel [mm] 200 200 500 500
Repeatability unidirectional [μm] ± 3 ± 0.3 ± 3 ± 0.3
Repeatability bidirectional [μm] ± 4 ± 0.5 ± 4 ± 0.5
Positioning speed [mm/s] 50 50 50 50
Max. speed [mm/s] 100 100 100 100
Max. load Fx [N] 49 49 49 49
Max. load Fy [N] 49 49 49 49
Max. load Fz [N] 9 9 9 9
Length [mm] 446 446 706 706
Width [mm] 86 86 86 86
Height [mm] 61 61 51 51
Lubrication liquid [mbar] up to 10-8
Lubrication dry [mbar] up to 10-9
Max. Bakeout temperature [deg] 120
Motor   Stepper Motor
Bearing   stainless steel hybrid, Recirculating Ball Guides
Feedback   Open Loop  Linear Scale Open Loop Linear Scale
Resolution Measuring system     0.5 µm   0.5 µm
Optional features   lead screw with dry lube or ball screw with liquid lube, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
Variants clean room    up to clean room class ISO 4 (higher on request)
Variants beam   UV, DUV, EUV (X-ray, gamma on request)
Variants Magnetism   magnetic
Variants vacuum    all ranges up to 10E-9 mbar HV / UHV

 

Your customized system

201/5000 Even more axes for your vacuum applications

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10E-6 mbar - or even better - available. Click here for the overview of our standard axes!

Overwiew standard stages   Contact technical consultants

 

Only selected materials, components, and lubricants meet the requirements for low outgassing. In many cases, the use of liquid lubricants is not possible. In addition, the bake-out process places significant stress on the positioning system; thermal stresses occurring at temperatures of up to 140 °C must be taken into account.
All components are designed to be vacuum-compatible and are specially cleaned after manufacturing. Assembly is carried out under cleanroom conditions. For non-magnetic systems, the choice of materials is even more severely restricted.

We offer a wide range of solutions for both UHV systems with the highest performance requirements and non-magnetic assemblies.

The customized adaptation of our positioning systems to existing chambers or setups is carried out in several structured steps. The goal is seamless integration with maximum precision, cleanroom and/or vacuum compatibility, and operational reliability.

Typically, the customization process includes:

  • Analysis of the installation situation (available space, interfaces, loads, degrees of freedom, environmental conditions)
  • Application-specific alignment with respect to vacuum, cleanroom, magnetism, or radiation requirements
  • Mechanical adaptations such as custom adapters, base plates, hole patterns, or installation heights
  • Adaptation of drive, measurement, and cabling concepts, including connector routing, feedthroughs, and cable management
  • Material and lubricant selection tailored to outgassing behavior, particle requirements, and bake-out conditions


The system design is carried out using 3D design and simulation, optionally complemented by prototypes, functional testing, and cleanroom or vacuum preparation.

Our positioning systems are designed for various cleanroom classes in accordance with ISO 14644-1 and can be adapted to the specific application. As standard, we implement systems for ISO 6 to ISO 4. For particularly demanding custom applications—depending on system concept, motion, materials, and lubrication—cleanroom classes down to ISO 2–1 are also possible.

The achievable cleanroom class depends, among other factors, on:

  • the selected mechanics and bearing concept
  • the drive and measurement systems used
  • materials, surface treatments, and lubricants
  • motion profiles and operating conditions, e.g., enclosure and extraction
  • multi-level cleaning processes, handling, and commissioning

All cleanroom systems are appropriately prepared, assembled, and final-cleaned in a cleanroom environment. Upon request, we develop custom solutions precisely tailored to the required cleanroom class and application.

Nearly all atmospheric standard axes are available anodized with UHV lubrication for residual pressures down to 10E-6 mbar — or even better. For systems with stepper or piezo motors, we offer the following vacuum preparation:

  • All parts vacuum-cleaned
  • Liquid lubrication with UHV oil for pressures down to 10-6 mbar
  • Maximum bake-out temperature 80 °C
  • Equipped with Phytron stepper motors
  • Stainless steel components (ball screw, guides, bearings, screws)
  • Kapton or PTFE cabling
  • Kapton or ceramic Sub-D connectors
  • Untreated aluminum surfaces
  • Bores and cavities with venting holes, vented screws, or slotted washers
  • No covers
  • Assembled in our cleanroom
  • Final cleaned
  • Delivered in evacuated, double plastic packaging

 

Click here for more systems:
Overview of our standard axes

Are you looking for a technical solution for your application?

Get your first 3D Design in a few days:

 

Elger Matthes
Consulting, Concepts, Innovation & Engineering
T +49 351 88585-82
E-Mail

Our references