KLT310
Vacuum / Cleanroom XY stages

782330:178.26
KLT310 - Vacuum / Cleanroom XY stages

 

Heavy-Duty XY Stage

HV, DUV, cleanroom ISO 6, travel 100 x 100 mm, repeatability up to 0.7 µm, speed 20 mm/s, load capacity up to 28 kg

  • Cleanroom: versions up to ISO Class 6 (higher classes on request)
  • Vacuum: all ranges up to HV 10-7 mbar
  • Lubrication: liquid lubrication up to 10-7 mbar
  • Max. bake-out temperature: 100°C
  • Aperture in Y: 150 x 150 mm
Optionally configurable:
  • With or without measurement system
  • Can be combined with rotary tables (e.g. DT155) for rotational applications
  • Material selection and lubrication adapted to the application
  • Optional controller FMC400/450
  • Custom development including 3D design, prototyping, and series production

Ideal for demanding inspection tasks

The cross table combines two high-precision screw-driven axes, achieving excellent accuracy values. With its robust design and a travel range of 100 mm in both X and Y directions, the KLT310 enables precise positioning even for heavy loads. With its performance characteristics, the KLT310 is ideal for high-precision inspection processes.

It can be easily combined with the DT155 rotary table, allowing for a wide range of applications.
 

Application Areas

Precision positioning for laboratory applications, microscopy and semiconductor technology, research in ultra-high vacuum and under extreme ultraviolet radiation, sample preparation, sample scanning, sample handling, biochips, wafer inspection, wafer alignment, camera alignment, materials research, materials analysis, beamlines, accelerators, synchrotron

 

KLT310   -100-SM -100-SM-L
Standard System   LT310 LT310
Travel [mm] 100 x 100 100 x 100
Repeatability unidirectional [μm] ± 1.6 ± 0.7
Repeatability bidirectional [μm] ± 2.1 ± 0.5
Positioning speed [mm/s] 10 10
Max. speed [mm/s] 20 20
Max. load Fx [N] 45 45
Max. load Fy [N] 45 45
Max. load Fz [N] 280 280
Length [mm] 310 310
Width [mm] 310 310
Height [mm] 100 100
Aperture Y [mm] 150 x 150
Weight [kg] 15
Lubrication liquid [mbar] up to 10-7
Max. Bakeout temperature [deg] 100
Drive   Ball Screw 1214.545/1.8.138.188R P3P
Screw lead   1
Bearing   profile rail
Motor   Stepper Motor
Feedback   Open Loop Linear Scale
Resolution measuring system without 0.05 µm, optional up to 0.001 µm
Optional features   Lead screw with dry lube or ball screw with liquid lube, different motor types, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
Variants clean room  up to cleanroom class ISO 6 (higher on request)
Variants beam   UV, DUV (EUV, X-ray, gamma on request)
Variants magnetism magnetic
Variants vacuum    all ranges up to 10E-7 mbar HV

 

Used Standard Components

KGT 1214

Cylindrical nut with 4-point-contact and internal ball return

Your customized system

201/5000 Even more axes for your vacuum applications

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

Overwiew standard stages   Contact technical consultants

 

Are you looking for a technical solution for your application?

Get your first 3D Design in a few days:

 

Elger Matthes
Consulting, Concepts, Innovation & Engineering
T +49 351 88585-82
E-Mail

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