KT105
Vacuum / Cleanroom XY stages

782325:029.26 (without aperture)
KT105 - Vacuum / Cleanroom XY stages

 

High resolution XY stage

UHV 10E-11 mbar, EUV, ISO 4 | Travel 50 mm | Rep 0.3 µm | Load 3 kg | Speed 50 mm/s

  • Vacuum: all ranges HV / UHV / EUV up to 10-11 mbar
  • Lubrication liquid up to 10-8 / dry up to 10-11 mbar
  • Max. Bakeout temperature: 120°C
  • Clean room class 4 ISO 14644-1 (up to class 1 on request)

Optionally configurable:

  • With and without aperture
  • Available as magnetic, low-magnetic and magnet-free versions
  • Different motor variants: Nanomotion or piezo motor
  • Combinable with XYZ positioning system (e.g. MT105)
  • Combinable with rotary stages (e.g. DT105) for rotary applications
  • Optional with controller FMC400/450

Flexible XY stage with aperture

The XY stage with aperture and cross roller bearings offers high dynamics and speed for applications in high vacuum, ultra-high vacuum and under extreme ultraviolet radiation. Compared to its size, it enables very small step sizes. Equipped with a piezo motor, it achieves the smallest steps in the nanometer range with an almost unattainable position stability. With a nanomotion, it achieves very high dynamics as well as high speeds and has a maximum service life with precision in the micrometer range.

It can be easily combined with the MT105 lifting stage, thus offering many application possibilities.
 

Fields of application

Precision positioning for laboratory applications, microscopy and semiconductor technology, research in ultra-high vacuum and under extreme ultraviolet radiation, sample preparation, sample scanning, sample handling, biochips, wafer inspection, wafer alignment, camera adjustment, materials research, materials analysis, beamline, accelerator, synchrotron

 

KT105   -50-PM-L -50-LM-L  
Travel [mm] 50 x 50 50 x 50  
Repeatability unidirectional [μm] ± 0.3 ± 0.5  
Repeatability bidirectional [μm] ± 0.4 ± 0.7  
Positioning speed [mm/s] 5 25  
Max. speed [mm/s] 10 50  
Max. load Fx [N] 5 4  
Max. load Fy [N] 5 4  
Max. load Fz [N] 45 45  
Length [mm] 150 0  
Width [mm] 150 0  
Height [mm] 50 0  
Lubrication liquid [mbar] up to 10-8    
Lubrication dry [mbar] up to 10-11    
Max. Bakeout temperature [deg] 120  
Motor   Piezo Motor Nanomotion  
Bearing   cross roller bearings stainless steel, hybrid, optional full ceramic  
Feedback   Linear Scale  
Resolution Measuring system 0.1 µm, optional 0.001 µm   
Optional features   With or without aperture, DT105 rotary stage, HT160 / MT105 Z-axis, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs  
Variants clean room  up to clean room class ISO 4 (higher on request)
Variants beam   UV, DUV, EUV (X-ray, gamma on request)  
Variants Magnetism magnetic, low-magnetic, magnet-free
Variants vacuum    all ranges up to 10E-11 mbar HV / UHV

 

Your customized system

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Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10E-6 mbar - or even better - available. Click here for the overview of our standard axes!

Overwiew standard stages   Contact technical consultants

 

Only selected materials, components, and lubricants meet the requirements for low outgassing. In many cases, the use of liquid lubricants is not possible. In addition, the bake-out process places significant stress on the positioning system; thermal stresses occurring at temperatures of up to 140 °C must be taken into account.
All components are designed to be vacuum-compatible and are specially cleaned after manufacturing. Assembly is carried out under cleanroom conditions. For non-magnetic systems, the choice of materials is even more severely restricted.

We offer a wide range of solutions for both UHV systems with the highest performance requirements and non-magnetic assemblies.

The customized adaptation of our positioning systems to existing chambers or setups is carried out in several structured steps. The goal is seamless integration with maximum precision, cleanroom and/or vacuum compatibility, and operational reliability.

Typically, the customization process includes:

  • Analysis of the installation situation (available space, interfaces, loads, degrees of freedom, environmental conditions)
  • Application-specific alignment with respect to vacuum, cleanroom, magnetism, or radiation requirements
  • Mechanical adaptations such as custom adapters, base plates, hole patterns, or installation heights
  • Adaptation of drive, measurement, and cabling concepts, including connector routing, feedthroughs, and cable management
  • Material and lubricant selection tailored to outgassing behavior, particle requirements, and bake-out conditions


The system design is carried out using 3D design and simulation, optionally complemented by prototypes, functional testing, and cleanroom or vacuum preparation.

Our positioning systems are designed for various cleanroom classes in accordance with ISO 14644-1 and can be adapted to the specific application. As standard, we implement systems for ISO 6 to ISO 4. For particularly demanding custom applications—depending on system concept, motion, materials, and lubrication—cleanroom classes down to ISO 2–1 are also possible.

The achievable cleanroom class depends, among other factors, on:

  • the selected mechanics and bearing concept
  • the drive and measurement systems used
  • materials, surface treatments, and lubricants
  • motion profiles and operating conditions, e.g., enclosure and extraction
  • multi-level cleaning processes, handling, and commissioning

All cleanroom systems are appropriately prepared, assembled, and final-cleaned in a cleanroom environment. Upon request, we develop custom solutions precisely tailored to the required cleanroom class and application.

Nearly all atmospheric standard axes are available anodized with UHV lubrication for residual pressures down to 10E-6 mbar — or even better. For systems with stepper or piezo motors, we offer the following vacuum preparation:

  • All parts vacuum-cleaned
  • Liquid lubrication with UHV oil for pressures down to 10-6 mbar
  • Maximum bake-out temperature 80 °C
  • Equipped with Phytron stepper motors
  • Stainless steel components (ball screw, guides, bearings, screws)
  • Kapton or PTFE cabling
  • Kapton or ceramic Sub-D connectors
  • Untreated aluminum surfaces
  • Bores and cavities with venting holes, vented screws, or slotted washers
  • No covers
  • Assembled in our cleanroom
  • Final cleaned
  • Delivered in evacuated, double plastic packaging

 

Click here for more systems:
Overview of our standard axes

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Elger Matthes
Consulting, Concepts, Innovation & Engineering
T +49 351 88585-82
E-Mail

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