LA80
Vacuum / Cleanroom compact multi axes systems & aligner

782475:038.26, 782475:049.26
LA80 - Vacuum / Cleanroom compact multi axes systems & aligner

 

High speed linear stage

HV / UHV / EUV, ISO 4, 200 -500 mm travel, 0.4 µm repeatability, 5 kg load

  • Cleanroom: variants up to class ISO 6 (higher on request)
  • Vacuum: all ranges HV / UHV / EUV up to 10-11 mbar
  • Lubrication liquid up to 10-8 / dry up to 10-11 mbar
  • Lifetime in the kilometer range despite dry lubrication
  • Max. Bakeout temperature: 120°C
  • Available as magnetic version
Optionally configurable:
  • Optionally with and without measuring system
  • Material selection and vacuum lubrication adapted to the application
  • Can be combined to a fast XYZ transfer system (e.g. LA90, LA95, LA170)
  • Individual adaptation to the installation situation in the chamber
  • Versions for clean room ISO 14644-1 (up to class 1 on request)
  • Optional with Controller FMC400/450

Long lifetime despite dry running

This linear axis is used as a powerful component for multi-axis systems and for highly dynamic transfer systems. It enables fast positioning with extremely high resolution in ultra-high vacuum, even in the vertical direction. A ball screw ensures high stiffness and standstill stability at high speed. The system does not require liquid lubricants and still offers lifetime in the range of many kilometers.
 

Fields of application

High-precision transfer systems in ultra-high vacuum under extreme ultraviolet radiation, semiconductor fabrication, beam shaping for exposure processes, surface analysis and sensor positioning, mass spectrometry, OLED coating processes, layer thickness measurement and layer rate measurement, surface coating (sputtering, vapor deposition), beam exits, experimental setups, sensor arrays for investigations of samples close to their native state

References

OMNY—A tOMography Nano crYo stage | Review of Scientific Instruments 89, 043706 (2018) | https://doi.org/10.1063/1.5020247

 

LA80 -200-SM-200-SM-L-500-SM-500-SM-L
Travel[mm]200200500500
Repeatability unidirectional[μm]± 3± 0.3± 3± 0.3
Repeatability bidirectional[μm]± 4± 0.5± 4± 0.5
Positioning speed[mm/s]50505050
Max. speed[mm/s]100100100100
Max. load Fx[N]49494949
Max. load Fy[N]49494949
Max. load Fz[N]9999
Length[mm]446446706706
Width[mm]86868686
Height[mm]61615151
Lubrication liquid[mbar]up to 10-8
Lubrication dry[mbar]up to 10-11
Max. Bakeout temperature[deg]120
Motor Stepper Motor
Bearing stainless steel hybrid, Recirculating Ball Guides
Feedback Open Loop Linear ScaleOpen LoopLinear Scale
Resolution Measuring system  0.5 µm 0.5 µm
Optional features lead screw with dry lube or ball screw with liquid lube, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
Variants clean room  up to clean room class ISO 4 (higher on request)
Variants beam UV, DUV, EUV (X-ray, gamma on request)
Variants Magnetism magnetic
Variants vacuum  all ranges up to 10E-11 mbar HV / UHV

 

Your customized system

201/5000 Even more axes for your vacuum applications:

Even more axes for your vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

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Are you looking for a technical solution for your application?

Get your first 3D Design in a few days:

 

Elger Matthes
Development, Consulting, Concepts, Innovationn

T +49 (0) 351 88585-0
E-Mail

Ronald Schulze
Consulting, Project Management & Engineering

T +49 (0) 351 88585-67
E-mail