PLT165
Vacuum / Cleanroom linear stages and axes

782355:082.26
PLT165 - Vacuum / Cleanroom linear stages and axes

 

Präzise UHV Linear Stage

UHV / UV / DUV, ISO 6, travel 100 - 500 mm, load 9 kg, rep 3.9 µm, width 165 mm

  • Cleanroom: variants up to class ISO 6 (higher on request)
  • Vacuum: all areas in ultra high vacuum, lubrication liquid up to 10-10 mbar
  • Max. bake-out temperature: 80°C
Options:
  • Repeat accuracy with control to scale or open loop for lower accuracy requirements
  • Design for cleanroom, vacuum and beam
  • Nitrogen atmosphere design
  • Customized development with 3D design, prototypes, series production
  • Optional with FMC400/450 controller

Ideal for vertical applications

A ball screw drive in combination with an electromagnetic brake offers maximum self-retention force, allowing a vertical position to be maintained even when the device is de-energized. The PLT165 can be easily combined with the lifting stage HT160.

Fields of application

Semiconductor manufacturing & handling, UHV positioning, positioning for scanning applications, transfer positioning, semiconductor technology, ultra-high vacuum, vacuum chambers, research, beamline instrumentation, electronics assembly and inspection

 

782355:082.26   -100-SM -200-SM -300-SM -400-SM -500-SM
Travel [mm]  100 200 300 400 500
Repeatability unidirectional [µm] ± 3.9 ± 3.9 ± 3.9 ± 3.9 ± 3.9
Repeatability bidirectional [µm] ± 4.4 ± 4.4 ± 4.4 ± 4.4 ± 4.4
Positioning speed [mm/s] 30 30 30 30 30
Max. speed [mm/s] 50 50 50 50 50
Max. acceleration [m/s2] 0.5 0.5 0.5 0.5 0.5
Max. load Fx [N] 94 94 94 94 94
Length [mm] 400 500 600 700 800
Width [mm]  165
Height [mm]  62
Max. bakeout temperature [deg] 80
Lubrication liquid [mbar] up to 10-10
Motor   Stepper Motor
Drive   Ball Screw Drive 1412.579/5.16.730.787R P5P
Screw lead   5
Bearing   Profile Rail
Feedback   Open Loop (optional with Linear Scale)
Material   Anodized Aluminum, Stainless Steel
Optional features   Repeat accuracy with control to scale or open loop for lower accuracy requirements, gearbox, nitrogen atmosphere design, customer-specific flour-free / PFAS-free UHV lubrication, custom adapter, custom bore grid, custom cable / connector
Variants cleanroom    up to clean room class ISO 6 (higher on request)
Variants beam   UV (DUV, EUV, X-ray, gamma on request)
Variants magnetism   magnetic
Variants vacuum    up to 10E-10 mbar in ultra-high vacuum (UHV)

 

Angepasstes System für Ihr Gesamtkonzept

Your customized system

201/5000 Even more axes for your vacuum applications

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

Overwiew standard stages   Contact technical consultants

 

Are you looking for a technical solution for your application?

Get your first 3D Design in a few days:

 

Elger Matthes
Consulting, Concepts, Innovation & Engineering
T +49 351 88585-82
E-Mail

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