HT240
Vacuum / Cleanroom lifting stages

782331:117.26
HT240 - Vacuum / Cleanroom lifting stages

 

Precise high load vertical lifting stage

UHV, DUV / EUV, cleanroom ISO 4, travel 25 mm, rep 0.3 µm, 40 kg load

  • Cleanroom: variants up to class ISO 4 (higher on request)
  • Vacuum: all ranges HV / UHV / EUV up to 10-9 mbar
  • Lubrication liquid up to 10-8 / dry up to 10-9 mbar
  • Max. Bakeout temperature: 120°C
Options:
  • Material selection and lubrication adapted to the application
  • Version for cleanroom, vacuum and beam
  • Optional with controller FMC400/450
  • Customized development with 3D design, prototypes, series production

Precise lifting stage for high loads up to 40 kg

The lifting stage is suitable for high-precision vertical movements under extreme conditions, such as in high vacuum, ultra-high vacuum. Due to its lift-wedge principle, it achieves its parameters despite its low overall height of 90 mm. The combination of stepper motor and a precise ball screw, optional lead screw, enables smallest step sizes at comparatively high loads.
 

Application areas

Precision positioning in industry and research in ultra-high vacuum and under extreme ultraviolet radiation, wafer alignment, wafer inspection, camera alignment, materials research, materials analysis, inspection, microscopy in vacuum, beamline, accelerator, synchrotron

 

HT240   -SM -SM-L
Travel [mm] 25 25
Repeatability unidirectional [μm] ± 1.7 ± 0.3
Repeatability bidirectional [μm] ± 2.7 ± 0.5
Positioning speed [mm/s] 2.2 2.2
Max. speed [mm/s] 4.4 4.4
Max. load Fx [N] 440 440
Max. load Fy [N] 440 440
Max. load Fz [N] 410 410
Length [mm] 460 460
Width [mm] 240 240
Height [mm] 90 90
Weight [kg] 14
Lubrication liquid [mbar] up to 10-8
Lubrication dry [mbar] up to 10-9
Max. Bakeout temperature [deg] 120
Drive   Ball Screw 1412./1.12.145.175R P3P
Motor   Stepper Motor
Bearing   Profile Rail, stainless steel, dry
Feedback   Open Loop  Linear Scale
Resolution Measuring system - 0.1 µm
Optional features   lead screw with dry lube or ball screw with liquid lube, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
Variants clean room  up to clean room class ISO 4 (higher on request)
Variants beam   UV, DUV, EUV (X-ray, gamma on request)
Variants magnetism magnetic
Variants vacuum    all ranges up to 10-9 mbar HV / UHV

 

Your customized system

201/5000 Even more axes for your vacuum applications

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

Overwiew standard stages   Contact technical consultants

 

Are you looking for a technical solution for your application?

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Elger Matthes
Consulting, Concepts, Innovation & Engineering
T +49 351 88585-82
E-Mail

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