MP220-4 Miniature XY-Phi-Delta Positioning System, Cardan on XY Aperture Stage | Hexapod Alternative | Travel XY 10 mm Rx Ry 4° | High Loads up to 10 kg
Compact Multi Axis Stages
AB_EM TO MP250-4
Cardan on XY Stage with aperture
This XY Phi Delta Aligner combines three vertically operating precision axes connected to a movable load plate. The load plate can be tilted in two axes and the aperture stage for a additional XY motion.
Options:
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Application fields
Optical & active alignment, high-resolution applications in microscopy, optical inspection systems, 3D imaging, screening, incident light measurement, transmitted light measurement, interferometry, metrology, autofocus systems, biotechnology, semiconductor testing
| MP220-4 | X | Y | Rx | Ry | |
| Travel | [mm] | (20) 10 | (20) 10 | 4 | 4 |
| Repeatability unidirectional | [µm] | ± 0.5 | ± 0.5 | ± 0.003 | ± 0.003 |
| Repeatability bidirectional | [µm] | ± 1 | ± 1 | ± 0.01 | ± 0.01 |
| Positioning speed | [mm/s] | 2 | 2 | 0.1 | 0.1 |
| Max. speed | [mm/s] | 4 | 4 | 0.2 | 0.2 |
| Max. Load | [N] | 0 | 0 | 100 | |
| Length x width x height | [mm] | 235 x 220 x 100 | |||
| Aperture | [mm] | Ø 45 | |||
| Drive | Lead Screw | Lead Screw | Lead Screw | Lead Screw | |
| Screw type | M5,55625x0,6096 | ||||
| Motor | Stepper Motor | Stepper Motor | Stepper Motor | Stepper Motor | |
| Feedback | Open Loop | Open Loop | Open Loop | Open Loop | |
| Material | Anodized Aluminum | ||||
| Optional features | Rotary stage, sample holder, calibreless energy supply for unlimited rotation | ||||
| Variants clean room | up to cleanroom class ISO 4 (higher on request) | ||||
| Variants beam | UV, DUV (EUV, X-ray, gamma on request) | ||||
| Variants Magnetism | magnetic (low-magnetic on request) | ||||
| Variants vacuum | up to 10E-6 mbar (higher on request) | ||||
| Note | Fixed pivot position 25 mm below stage surface. For fixed inspection point, correct with offset when tilting. | ||||
