5DOF Miniature XYZ-Phi-Delta Positioning System, Tripod on XY Aperture Stage | Hexapod Alternative | Travel XY 100 x 100 mm, Z 4 mm, Rx Ry 4°
Compact Multi Axis Stages

228665 MP200-3+KDT 235

Tripod on XY stage with aperture

This aligner is designed with 5 degrees of freedom. Internally, the tripod includes the MP200-3 with three vertically operating precision axes, which are connected to the movable load plate by means of solid joints. This enables the load plate to be tilted in two axes and also adjusted in height. The tripod is mounted on the KDT235 apterure scanning stage for additional XY motion.

Ideal for optical and active alignment

Motion Control: X,Y direction separate and Rx, Ry, Z parallel

Good price-performance ratio and very long lifetime

Options:

Rotation around the main axis with an additional rotary stage
Various, high-resolution measuring systems
Extended travel range in XY direction
Configuration for clean room (up to ISO class 4, vacuum, laboratory or production
Customized development with 3D design, prototypes, series production

Application fields

Optical & active alignment, high-resolution applications in microscopy, optical inspection systems, 3D imaging, screening, incident light measurement, transmitted light measurement, interferometry, metrology, autofocus systems, biotechnology, semiconductor testing

Specifications

MP200-3 + KDT235 (228665)		X	Y	Z	Rx	Ry
Standard System		KDT235-SM	KDT235-SM	MT63-DC	MT63-DC	MT63-DC
Travel	[mm]	50	50	4	3	3
Repeatability unidirectional	[µm]	± 1.6	± 1.6	± 0.5	± 0.00005	± 0.00005
Repeatability bidirectional	[µm]	± 2.1	± 2.1	± 2.5	± 0.00020	± 0.00020
Positioning speed	[mm/s]	10	10	1	0.8	0.8
Max. speed	[mm/s]	20	20	1.8	1.5	1.5
Max. Load	[N]			20
Length x width x height	[mm]	235 x 235 x 170
Aperture	[mm]	Ø 45
Weight	[kg]	14
Drive		Ball Screw	Ball Screw	Lead Screw, Belt	Lead Screw, Belt	Lead Screw, Belt
Screw type		1214.20/1.8.88.138 P3P		M5x0,5	M5x0,5	M5x0,5
Lead		1	1	0.5	0.5	0.5
Motor		Stepper Motor	Stepper Motor	DC-Motor	DC-Motor	DC-Motor
Feedback		Open Loop	Open Loop	Motor Encoder	Motor Encoder	Motor Encoder
Resolution Measuring System		0.1 µm (optionally up to 0.001 µm)
Material		Anodized Aluminum
Optional features		Rotary stage, sample holder, calibreless energy supply for unlimited rotation
Variants clean room		up to cleanroom class ISO 4 (higher on request)
Variants beam		UV, DUV (EUV, X-ray, gamma on request)
Variants magnetism		magnetic (low magnetic on request)
Variants vacuum		up to 10E-6 mbar (higher on request)