PiezoLEGS® Motor
In general, piezo motors are characterized by very high resolution in the nanometer range.
PiezoLEGS® motors also provide high stiffness. They are self-holding and extremely stable. Only low speeds can be realised, but with very high forces. A measurement system is not essential for this motor type and it can be operated open loop if required. In contrast to other piezo motors, this motor type can only be used to a limited extent in a vacuum.