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ALL SYSTEMS
STANDARD
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OEM Positioning Systems
XY theta alignment of UV exposure masks | High-precision...
… linear and rotational positioning of masks in the
nanometer
range under ulaviolet radiation as...
XYZ positioning system for inspection & metrology by...
… 1300 x 800 mm-782300:150.26-µm-accurate positioning and
nanometer
stability during measurement ...
2-XYZ-Phi System with
nanometer
stability for...
…2-XYZ-Phi System with
nanometer
stability for microassembly and...
Multi Axes Systems
XYZ gantry for inspection of large parts up to 450 x 1000...
… movement. This enables high-resolution imaging in the
nanometer
range as well as numerous...
XZ-Phi system | X linear motor, ball screw | Z DC motor,...
… of samples, measurements in the micrometer and
nanometer
range, sample preparation, rotatory and...
MP53-2-1
… in ausreichendem Maße erhalten, um Bewegungen im
Nanometer
-Bereich in Zug- und auch Druckrichung...
MP53-3
… ausgerüstet und kann somit Stellinkremente von wenigen
Nanometer
n realisieren....
Vacuum
LA97
…LA97-782457:005.24-
Nanometer
linear stage HV / UHV up to 10^-11, 100 - 300 mm avel, 0.02 µm...
LT300
… with conoller FMC400/450 Stability in the
nanometer
range even high loads up to 10 kg The...
KLT300
… with conoller FMC400/450 Highest stability in the
nanometer
range, even in dry operation The...
KDT105
… with a piezo motor, it achieves the smallest steps in the
nanometer
range with an almost...
LA80-2LA95
… up to 5 µm repeatabilityOutstanding standstill in the
nanometer
range due to additional piezo...
LA97-2MT85
… ist die hervorragende Stabilität nach der Bewegung im
Nanometer
bereich. - Vakuum Mehrachssysteme
MP53-3-PM
… and can thus realize positioning increments of a few
nanometer
s for high-precision applications in...
MP105-3
… ausgerüstet und kann somit Stellinkremente von wenigen
Nanometer
n für hochpräzise Anwendungen im...
Standard Axes & Stages
MT53-PM
… bearings and a piezo motor, allowing steps in the
nanometer
range. In the vacuum and non-magnetic...
Search
Submicrometer precision for lasers in space | Astronomy
… an assembly station with position stability in the
nanometer
range. open system Whether...
Submikrometer-Präzision für Laser im Weltall | Astronomie
… wir eine Montagestation mit Positionsstabilität im
Nanometer
bereich. Das ILT hat einen Laser zur...
Visible nanocosmos | XYZ system for Atomic Force...
… it must not move. After all, height differences of one
nanometer
or less should be measured...
Application Areas
Wafer and Chip Inspection
… and metrology of wafer microstructures in the
nanometer
range. For you we find customized...
Company
Innovations time line
… X-2(YZ Phi) assembly system with
nanometer
stability for solid-state lasers operated in...
