MT53
Vacuum / Cleanroom linear stages and axes
782325:013.26
Miniature linear stage
53 x 53 x 20 mm, HV / UHV / DUV / EUV, travel 10 mm, repro 0.2 µm, load 0.8 kg, speed 7.5 mm/s
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Sub-micrometer increments by piezo motor
The MT53 is equipped with cross roller bearings and a piezo motor, allowing steps in the nanometer range in very limited dimensions. Travel ranges of 10 mm are realized. Accuracies of +- 0.005 µm are possible with an appropriate linear measuring system.
Fields of application
Precision positioning in compact dimensions for laboratory applications, semiconductor technology, research in ultra-high vacuum and under extreme ultraviolet radiation, sample preparation, sample scanning, sample handling, camera alignment, sensor alignment, materials research, materials analysis, beamline, accelerator, synchrotron, miniaturization
| MT53 | -10-PM-L | ||
| Travel | [mm] | 10 | |
| Repeatability unidirectional | [μm] | ± 0.2 | |
| Repeatability bidirectional | [μm] | ± 0.3 | |
| Positioning speed | [mm/s] | 5 | |
| Max. speed | [mm/s] | 7.5 | |
| Max. load Fx | [N] | 5 | |
| Max. load Fy | [N] | 8.8 | |
| Max. load Fz | [N] | 8.8 | |
| Length | [mm] | 53 | |
| Width | [mm] | 53 | |
| Height | [mm] | 20 | |
| Lubrication liquid | [mbar] | up to 10-8 | |
| Lubrication dry | [mbar] | up to 10-11 | |
| Max. Bakeout temperature | [deg] | 120 | |
| Motor | Piezo Motor | ||
| Bearing | cross roller bearings stainless steel, hybrid, optional full ceramic | ||
| Feedback | Linear Scale | ||
| Resolution Measuring system | 0.1 µm, optionally up to 0.005 µm | ||
| Optional features | positioning with very high resolution, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs | ||
| Variants clean room | up to clean room class ISO 6 (higher on request) | ||
| Variants beam | UV, DUV, EUV (X-ray, gamma on request) | ||
| Variants Magnetism | magnetic, low-magnetic, magnet-free | ||
| Variants vacuum | all ranges up to 10E-11 mbar HV / UHV | ||
201/5000 Even more axes for your vacuum applications:
Even more axes for your vacuum applications?
Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!
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