Vacuum / Cleanroom XY stages

KDT310-SM-HV - Vacuum / Cleanroom XY stages


Heavy load XY scanning stage

HV, DUV, Cleanroom ISO 6, 100 mm travel, travel 100 x 100 mm, rep up to 0.7 µm, speed 20 mm/s, load 20 kg

  • Clean room: variants up to class ISO 6 (higher on request)
  • Vakuum: all ranges HV up to 10-8 mbar
  • Lubrication: liquid up to 10-8 mbar
  • Max. bakeout temperature: 100°C
  • Aperture in X with 90 x 90 mm, Y 150 x 150 mm
Optionally configurable:
  • With and without measuring system
  • Can be combined with rotary stages (e.g. DT155) for rotary applications
  • Material selection and lubrication adapted to the application
  • Optional with controller FMC400/450
  • Customized development with 3D design, prototypes, series production

Highly loadable XY aperture system

The positioning system with aperture was combined from two linear stages to design a precise and heavy-duty XY stage for applications in high vacuum and ultra-high vacuum. Its concept with profile rail guides and high-precision ball screws enables outstanding precision with optimum use of the installation space.

It can be easily combined with the DT155 rotary stage, resulting in a wide range of applications.

Fields of application

Precision positioning for laboratory applications, microscopy and semiconductor technology, research in ultra-high vacuum and under extreme ultraviolet radiation, sample preparation, sample scanning, sample handling, biochips, wafer inspection, wafer alignment, camera adjustment, materials research, materials analysis, beamline, accelerator, synchrotron


KDT310 -100-SM-100-SM-L
Standard System LT310LT310
Travel[mm]100 x 100100 x 100
Repeatability unidirectional[μm]± 1.6± 0.7
Repeatability bidirectional[μm]± 2.1± 0.5
Positioning speed[mm/s]1010
Max. speed[mm/s]2020
Max. load Fx[N]196196
Max. load Fy[N]196196
Aperture X[mm]90 x 90
Aperture Y[mm]150 x 150
Lubrication liquid[mbar]up to 10-8
Max. Bakeout temperature[deg]100
Drive Ball Screw 1214.545/ P3P
Screw lead 1
Bearing profile rail
Motor Stepper Motor
Feedback Open LoopLinear Scale
Resolution measuring systemwithout0.05 µm, optional up to 0.001 µm
Optional features Lead screw with dry lube or ball screw with liquid lube, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
Variants clean room up to clean room class ISO 6 (higher on request)
Variants beam UV, DUV (EUV, X-ray, gamma on request)
Variants magnetismmagnetic
Variants vacuum  all ranges up to 10E-8 mbar HV


Your customized system

201/5000 Even more axes for your vacuum applications:

Even more axes for your vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

Dowload our product catalogue:

Are you looking for a technical solution for your application?

Get your first 3D Design in a few days:


Elger Matthes
Development, Consulting, Concepts, Innovationn

T +49 (0) 351 88585-0