KDT70-PM
Vacuum / Cleanroom XY stages
782440:006.24, 782440:011.26
Non-magnetic titanium XY stage
UHV / DUV / EUV, ISO 6, travel 10 x 10 mm, rep 0.3 µm, load 0.3 kg, speed 10 mm/s
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Fields of application
Precision positioning for laboratory applications, membrane-integrated microfluidics, organ-on-a-chip applications, acquisition, fixation, alignment, assembly of multiwell plates and membrane chips, research in ultra-high vacuum and under extreme ultraviolet beams, sample preparation, sample scanning, sample handling, biochips
| KDT70 | -10-PM | |
| Travel | [mm] | 10 x 10 |
| Repeatability unidirectional | [μm] | ± 0.3 |
| Repeatability bidirectional | [μm] | ± 0.4 |
| Positioning speed | [mm/s] | 5 |
| Max. speed | [mm/s] | 10 |
| Max. load Fx | [N] | 5 |
| Max. load Fy | [N] | 5 |
| Max. load Fz | [N] | 30 |
| Length | [mm] | 83 |
| Width | [mm] | 83 |
| Height | [mm] | 25 |
| Aperture | [mm] | Ø 30 |
| Lubrication liquid | [mbar] | up to 10-8 |
| Lubrication dry | [mbar] | up to 10-11 |
| Max. Bakeout temperature | [deg] | 120 |
| Motor | Nanomotion | |
| Bearing | cross roller bearings | |
| Feedback | Linear Scale | |
| Resolution measuring system | 0.1 µm, optional 0.001 µm / without measuring system | |
| Material | Titanium, aluminum | |
| Optional features | custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs | |
| Variants clean room | up to clean room class ISO 6 (higher on request) | |
| Variants beam | UV, DUV (EUV, X-ray, gamma on request) | |
| Variants Magnetism | magnetic, low-magnetic, magnet-free | |
| Variants vacuum | all ranges up to 10E-11 mbar HV / UHV | |
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