3 Axis Beam Aligner
Vacuum / Clean Room Multi Axes Systems


This positioning system is based on MT53 stages with piezo-drives. Two of those stages are used for xz-motion. Apart from xz another stage of the same make is situated. Because of extreme tight space the corners of each stage and even its linear guide rails had to chamfered.

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Contact Person for Vacuum Custom Systems

Dipl.-Ing. Elger Matthes

Phone: +49 (0) 351 88585-0