3 Axis Beam Aligner
Vacuum / Cleanroom Multi Axes Systems



This positioning system is based on MT53 stages with piezo-drives. Two of those stages are used for xz-motion. Apart from xz another stage of the same make is situated. Because of extreme tight space the corners of each stage and even its linear guide rails had to chamfered.


782300:087.26 XYZ
Standard System MT53-5-PMMT53-10-PMMT53-5-PM
Repeatability unidirectional[μm]± 0.2± 0.2± 0.2
Repeatability bidirectional[μm]± 0.3± 0.3 ± 0.3
Positioning speed[mm/s]555
Max. speed[mm/s]101010
Max. load Fx[N]555
Max. load Fy[N]
Max. load Fz[N]
Lubrication liquid[mbar]up to 10-8
Lubrication dry[mbar]up to 10-11
Max. Bakeout temperature[deg]120
Motor Piezo Motor 
Bearing cross roller bearings stainless steel, hybrid, optional full ceramic
Feedback Linear Scale
Resolution Measuring system0.1 µm, optionally up to 0.005 µm
Optional features custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
Variants clean room up to clean room class ISO 6 (higher on request)
Variants beam UV, DUV (EUV, X-ray, gamma on request)
Variants magnetismmagnetic, low-magnetic, magnet-free
Variants vacuum  all ranges up to 10E-11 mbar HV / UHV


Your customized system

201/5000 Even more axes for your vacuum applications:

Even more axes for your vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

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Elger Matthes
Development, Consulting, Concepts, Innovationn

T +49 (0) 351 88585-0