XYZ Double inspection portal with travels up to 720 mm | XY Linear motor, profile rail | Z Ball screw, AC Servo
Portals

782430:002.26

High-precision, high-throughput quality assurance for cleanroom applications

This inspection system consists of four cleanroom axes and enables automated measurement of multiple objects simultaneously. High dynamics and highest reproducibility are achieved. A high-resolution camera or sensor is moved relative to the sample to inspect geometries, perform measurements and document special quality features.

Automated and low-maintenance 24/7 inspection

Ideal for automated inspection of wafers, probe cards and printed circuit boards

Inspection of multiple objects simultaneously through travels up to 720 mm

Ideal for integration of two processes simultaneously

Low-maintenance 24/7 operation and flexible maintenance concept due to fast system exchange on the granite structure

Special features:

Clean room suitability for clean room ISO 14644-1 class 2 (up to class 1 on request)
Connections for exhaust and revolving belt covers
Available also as single portal
Ready-to-use control system with pre-configured controller incl. sample software

Individual extensions and customizations

Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests

Fields of application

Inspection of large wafers, probe cards and printed circuit boards, AOI, quality assurance, microscopy of large sample, surface inspection, measurement of chips, measurement of complicated geometric shapes

Specifications

782430:002.26		X	Y	Z
Standard System		PMT290-EDLM	PMT290-EDLM	0
Travel	[mm]	720	720	100
Repeatability unidirectional	[µm]	± 0.3	± 0.3	± 1.5
Repeatability bidirectional	[µm]	± 0.7	± 0.7	± 2.5
Positioning speed	[mm/s]	750	750	150
Max. speed	[mm/s]	1500	1500	300
Max. load	[N]	150	150	± 200
Max. sample dimension	[Ø]	12 inch / 300 mm
Length x width x height	[mm]	1230 x 1200 x 1030
Drive		Linear Motor	Linear Motor	Servo Motor, Ball Screw
Motor		Ironless Dynamic Linear Motor	Ironless Dynamic Linear Motor	AC Servo
Feedback		Linear Scale	Linear Scale	Motor Encoder
Clean room variants		up to ISO class 2
Beam variants		on request