XY Stages

Flat cross table for large substrates, equipped with linear motors.
KT500-EDLM - XY Stages

Compact, precise and fast

It is not only its very flat and compact design, outstanding accuracy and speed that makes the KT500 cross table very impressive but also its easy assembly and maintenance. Thanks to its 350 mm travel, the new XY table also scans large substrates and parts over the entire surface. The KT500 is a classic cross table made of uniform plates and is intended for scanning tasks. Depending on requirements, the scanning table is equipped with up to two electrodynamic linear motors in each direction (2+2 motors for particularly fast scanning results, 2+1 motors for a uniform dynamic).

Excellent process parameters

Highest repeatability is the basis for excellent accuracy values. The KT500 is therefore designed in such a way that all sequence parameters are exactly repeatable. This is achieved by measurement and compensation in the controller as well as cross roller guides which enable repeatable processes similar to air bearings. The repeatability in the travelling direction is ±0.1 µm. The repeatability of straightness and evenness is ±0.15 µm. In addition to the basic version with linear compensation (FMC200), the FMC400 series from Steinmeyer Mechatronics also comes with high-end controllers featuring polynomial compensation. Compared to cross tables with spindles, the design with linear motors offers enormous advantages, especially in terms of speed. The KT500 achieves a top speed of 300 mm/sec and, with an acceleration of 1g, also provides considerable time saving during start-stop operation.

Easy installation and maintenance

Thanks to a cable interface that can be disconnected via a plug connection, simple installation and maintenance is possible. The KT500 works completely maintenance-free up to 500,000 full strokes, after which only uncomplicated relubrication is necessary. Life expectancy is up to two million full strokes.

Modell KT500-350-EDLM-L
Travel [mm] 350
Repeatability unidirectional [μm]± 0.3
Repeatability bidirectional [μm]± 0.4
Accuracy [μm]± 10
Flatness [μm]± 10
Straightness [μm]± 5
Positioning speed [mm/s]200
Max. speed [mm/s]400
Max. acceleration [m/s2]4
Max. load Fx [N]25
Max. load Fy [N]25
Max. load Fz [N]100
Max. torque Mx [Nm]11
Max. torque My [Nm]11
Max. torque Mz [Nm]11
Pitch [µrad]± 190
Yaw [µrad]± 95
Subject to change. Values ​​apply to single axes with our controllers.

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Are you looking for the best technical solution? Get in touch with us:

Nadine Strudel

+49 151 16755992