MT105
Vacuum / Cleanroom linear stages and axes

782325:142.24, 782325:141.24, 782325:040.24

Customizable micro stage

10^ -11 HV / UHV / EUV, 30 - 100 mm travel, 0.4 µm repeatability, 5 kg load

Vacuum: all ranges HV / UHV / EUV up to 10^-11 mbar

Lubrication liquid up to 10^-8 / dry up to 10^-11 mbar

Max. Bakeout temperature: 120°C

Optionally configurable:

Available as magnetic, low magnetic and magnetic-free version
With up to 2 different motors for motion of high loads
Different motor variants: Nanomotion, piezo motor or linear motor
Combinable with the XYZ positioning system
Combinable with rotary tables (e.g. DT105) for rotary applications
Individual adaptation to the installation situation in the chamber
Version for clean room ISO 14644-1 (up to class 1 on request)
Optional with controller FMC400/450

Flexible and universal for demanding environmental conditions

The MT105 is a universally applicable micro stage that impresses above all with its high dynamics and speed. It is designed to achieve excellent running and positioning accuracies under extreme conditions, such as in high vacuum, ultra-high vacuum and for non-magnetic applications. Optionally, the micro stage can be equipped with two motors to position higher loads.

Fields of application

Semiconductor technology in ultra-high vacuum and under extreme ultraviolet radiation, wafer alignment, camera alignment, sensor alignment, bioprinting, high-throughput production of three-dimensional cell spheroids

References

Bioprinting-Based High-Throughput Fabrication of Three-Dimensional MCF-7 Human Breast Cancer Cellular Spheroids | Engineering (2015) Vol.1 Issue (2): 269-274 | https://www.engineering.org.cn/EN/10.15302/J-ENG-2015062

Spezifikationen

MT105		-30-2PM-L	-50-PM-L	-100-PM-L	-30-2NM-L	-50-LM-L	-100-LM-L
Travel	[mm]	30	50	100	30	50	100
Repeatability unidirectional	[μm]	± 0.2	± 0.2	± 0.2	± 0.4	± 0.4	± 0.4
Repeatability bidirectional	[μm]	± 0.3	± 0.3	± 0.3	± 0.5	± 0.5	± 0.5
Positioning speed	[mm/s]	5	5	5	50	50	50
Max. speed	[mm/s]	7.5	7.5	7.5	75	75	75
Max. load Fx	[N]	10	10	10	4	4	4
Max. load Fy	[N]	55	55	55	55	55	55
Max. load Fz	[N]	55	55	55	55	55	55
Length	[mm]	152
Width	[mm]	105
Height	[mm]	25
Lubrication liquid	[mbar]	up to 10^-8
Lubrication dry	[mbar]	up to 10^-11
Max. Bakeout temperature	[deg]	120
Motor		Piezo Motor	Piezo Motor	Piezo Motor	Nanomotion	Nanomotion	Nanomotion
Bearing		cross roller bearings stainless steel, hybrid, optional full ceramic
Feedback		Linear Scale
Resolution Measuring system		0.1 µm, optional 0.005 µm
Optional features		With up to 2 different motors for the motion of high loads, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
Variants clean room		up to clean room class ISO 6 (higher on request)
Variants beam		UV, DUV, EUV (X-ray, gamma on request)
Variants Magnetism		magnetic, low-magnetic, magnet-free
Variants vacuum		all ranges up to 10E-11 mbar HV / UHV

Änderungen vorbehalten. Werte gelten für Einzelachsen mit unseren Controllern. Hier angegeben sind typische Werte für eine Standardausführung. Durch individuelle Anpassungen und bei genauer Kenntnis Ihrer Anwendung können deutlich verbesserte Werte erreicht werden.