Surface Aligner with Stepper Motor and Ball Screw Drive


This aligner realizes translational movements of 10 mm horizontally and rotations of up to ± 3 degrees. The aligner was designed to carry loads up to 20 kg and ideally suited for the inspection of wafers and other planar substrates. The aperture allows transfer measurements.

Contact Person

Tobias Zilian

+49 (0) 30 67827660


Contact Person

Francisco Samuel

Tel.: +49 (0) 351 88585-85