Stages and Axes


Nanometer linear stage

HV / UHV up to 10^-11, 100 - 300 mm travel, 0.02 µm repeatability, up to 10 kg load

  • Vacuum: all areas HV / UHV up to 10-11 mbar
  • Lubrication: liquid up to 10-8 mbar / dry up to 10-11 mbar
  • Max. Bakeout temperature: 120°C
Optionally configurable:
  • Magnetic, low-magnetic and magnet-free versions available
  • Material selection and vacuum lubrication adapted to the application
  • Individual adaptation to the installation situation in the chamber
  • Version for clean room ISO 14644-1 (up to class 1 on request)
  • Optional with controller FMC400/450

Horizontal and vertical nanometer positioning

This vacuum linear axis is suitable for all HV / UHV ranges up to 10-11mbar. It is universally applicable, as it can also be used for vertical positioning tasks. It achieves extremely high resolutions and highest stiffness in vacuum. Depending on the load to be moved, 2 up to 6 motors can be used in pincer arrangement.


Fields of application

High precision scanning applications, micro assembly, semiconductor technology in ultra-high vacuum and under ultraviolet radiation, vacuum chambers, research, beamline instrumentation, electronics assembly and inspection

Travel[mm] 100200300
Repeatability unidirectional[µm]± 0.015± 0.015± 0.015
Repeatability bidirectional[µm]± 0.02± 0.02

± 0.02

Positioning speed[mm/s]555
Max. Load Fx[N]396898
Max. Load Fz[N]193958
Vacuum[mbar]up to 10-11  HV/UHV
Lubrication liquid[mbar]up to 10-8
Lubrication dry[mbar]up to 10-11
Max. Bakeout temperature[deg]120
Magnetism Versionsmagnetic  | low-magnetic | magnet-free
MotorPiezo Motor
Guidecross roller bearings stainless steel, hybrid, optional full ceramic
FeedbackLinear Scale


Specifications are subject to change. Values are for the single axis with our controller. Parameters shown here are typical values for a standard configuration. By customization and given in depth knowledge of your application significantly improved values can be achieved.

    1. Your customized system

    1. Your contact details
    1. *lease read our data protection regulations here before sending the contact form.

201/5000 Even more axes for your vacuum applications:

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6mba - or even better - available. Click here for the overview of our standard axes!

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Are you looking for the best technical solution? Get in touch with us:

Dipl.-Ing. Elger Matthes

Phone: +49 (0) 351 88585-0