2PLT165-DLM
XY Stages
High Performance XY Stage with travel 500 x 400 mm, Rep 0.4 µm, Speed 1160 mm/s, Load 6 kg
High Performance XY Stage
The drive concept of this linear stage combination from the PLT165 series is based on a linear motor and enables high accelerations and speeds. The precision XY Stage is ideal for highly dynamic applications with high loads.
Made for industrial applications
The PLT160 series axes can be combined flexibly with travel ranges from 200 - 750 mm with different motor variants for light up to heavy-duty applications. The protected housing and metal strip cover ensure dust and particle protection in industrial environments.
Various fields of application
Reliable 24/7 positioning under constant parameters, precise feeding of samples, sensors or optics, laser processing, semiconductor technology or metrology
| 2PLT165 | -500-DLM-L-400-DLM-L | |
| Art. No. | 782300:152.26 | |
| Travel | [mm] | 500 x 400 |
| Repeatability unidirectional | [μm] | ± 0.4 |
| Repeatability bidirectional | [μm] | ± 0.5 |
| Positioning speed | [mm/s] | 580 |
| Max. speed | [mm/s] | 1160 |
| Max. acceleration | [m/s2] | 12 |
| Max. load Fx | [N] | 60 |
| Max. load Fy | [N] | 60 |
| Max. load Fz | [N] | 520 |
| Length | [mm] | 800 |
| Width | [mm] | 700 |
| Height | [mm] | 145 |
| Weight | [kg] | 45 |
| Bearing | Profile Rail | |
| Motor | Iron Core Dynamic Linear Motor | |
| Feedback | Linear Scale | |
| Resolution Measuring system | 0.1 µm standard, optionally up to 0.001 µm | |
| Material | Anodized Aluminum | |
| Optional features | base plate (granite / aluminum), housing, break, prepared for sealing air, custom adapter, bore grid, cable / plugs | |
| Variants clean room | up to clean room class ISO 6 (higher on request) | |
| Variants beam | UV (DUV, EUV, X-ray, gamma on request) | |
| Variants Magnetism | magnetic | |
| Variants vacuum | on request | |
Stages for cleanroom and vacuum applications
Even more stage for your clean room and vacuum applications?
Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar and clean room class ISO 6 - or even better - available. Click here for the overview of our vacuum and clean room stages!
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