LA80
Vacuum / Cleanroom compact multi axes systems & aligner

782475:038.26, 782475:049.26

High speed linear stage

HV / UHV / EUV, ISO 4, 200 -500 mm travel, 0.4 µm repeatability, 5 kg load

Cleanroom: variants up to class ISO 6 (higher on request)

Vacuum: all ranges HV / UHV / EUV up to 10^-11 mbar

Lubrication liquid up to 10^-8 / dry up to 10^-11 mbar

Lifetime in the kilometer range despite dry lubrication

Max. Bakeout temperature: 120°C

Available as magnetic version

Optionally configurable:

Optionally with and without measuring system
Material selection and vacuum lubrication adapted to the application
Can be combined to a fast XYZ transfer system (e.g. LA90, LA95, LA170)
Individual adaptation to the installation situation in the chamber
Versions for clean room ISO 14644-1 (up to class 1 on request)
Optional with Controller FMC400/450

Long lifetime despite dry running

This linear axis is used as a powerful component for multi-axis systems and for highly dynamic transfer systems. It enables fast positioning with extremely high resolution in ultra-high vacuum, even in the vertical direction. A ball screw ensures high stiffness and standstill stability at high speed. The system does not require liquid lubricants and still offers lifetime in the range of many kilometers.

Fields of application

High-precision transfer systems in ultra-high vacuum under extreme ultraviolet radiation, semiconductor fabrication, beam shaping for exposure processes, surface analysis and sensor positioning, mass spectrometry, OLED coating processes, layer thickness measurement and layer rate measurement, surface coating (sputtering, vapor deposition), beam exits, experimental setups, sensor arrays for investigations of samples close to their native state

References

OMNY—A tOMography Nano crYo stage | Review of Scientific Instruments 89, 043706 (2018) | https://doi.org/10.1063/1.5020247

Spezifikationen

LA80		-200-SM	-200-SM-L	-500-SM	-500-SM-L
Travel	[mm]	200	200	500	500
Repeatability unidirectional	[μm]	± 3	± 0.3	± 3	± 0.3
Repeatability bidirectional	[μm]	± 4	± 0.5	± 4	± 0.5
Positioning speed	[mm/s]	50	50	50	50
Max. speed	[mm/s]	100	100	100	100
Max. load Fx	[N]	49	49	49	49
Max. load Fy	[N]	49	49	49	49
Max. load Fz	[N]	9	9	9	9
Length	[mm]	446	446	706	706
Width	[mm]	86	86	86	86
Height	[mm]	61	61	51	51
Lubrication liquid	[mbar]	up to 10^-8
Lubrication dry	[mbar]	up to 10^-11
Max. Bakeout temperature	[deg]	120
Motor		Stepper Motor
Bearing		stainless steel hybrid, Recirculating Ball Guides
Feedback		Open Loop	Linear Scale	Open Loop	Linear Scale
Resolution Measuring system			0.5 µm		0.5 µm
Optional features		lead screw with dry lube or ball screw with liquid lube, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
Variants clean room		up to clean room class ISO 4 (higher on request)
Variants beam		UV, DUV, EUV (X-ray, gamma on request)
Variants Magnetism		magnetic
Variants vacuum		all ranges up to 10E-11 mbar HV / UHV

Änderungen vorbehalten. Werte gelten für Einzelachsen mit unseren Controllern. Hier angegeben sind typische Werte für eine Standardausführung. Durch individuelle Anpassungen und bei genauer Kenntnis Ihrer Anwendung können deutlich verbesserte Werte erreicht werden.