XYZ positioning system for automated inspection - wafer / probe cards (clean room) | Stroke 720 x 720 x 100 mm
Inspection and Mikroscopy
782300:148.26.oem
High-precision quality inspection for cleanroom applications
This inspection system (shown here without cover) is specially designed for automated quality control of large wafers, probe cards and printed circuit boards. A high-resolution camera or sensor in Z is movable relative to the sample or carrier on the linear stage. Operation is controlled by a separate motion controller for the three axes.
Increased throughput by automated 24/7 inspection
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Optionally expandable:
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Individual extensions and customizations
Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle testsFields of application
Inspection of large wafers, probe cards and printed circuit boards, AOI, quality assurance, microscopy of large sample, surface inspection, measurement of chip, measurement of objects on complicated geometric shapes
782300:148.26 | X | Y | Z | |
Standard system used | PMT290-EDLM | PMT290-EDLM | ||
Travel | [mm; deg] | 820 | 820 | 100 |
Repeatability unidirectional | [µm; deg] | ± 0.3 | ± 0.3 | ± 1.5 |
Repeatability bidirectional | [µm; deg] | ± 0.4 | ± 0.7 | ± 2.5 |
Positioning speed | [mm/s; deg/s] | 750 | 750 | 150 |
Max. speed | [mm/s; deg/s] | 1500 | 1500 | 300 |
Max. Load | [N] | 150 | 150 | ± 200 |
Motor |
| Ironless Dynamic Linear Motor
| Ironless Dynamic Linear Motor
| AC Servo |
Drive |
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| Ball Screw |
Feedback | Linear Scale
| Linear Scale
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FMC 300
Einbau-Modul für dynamische Anwendungen und hohe Lasten und Spannung.
FMC400/450
Voll bahnfähiger Mehrachscontroller, einfaches Erstellen von eigenen Programmen.
SPS
Wir unterstützen die Anbindung unserer Systeme an SPS-Architekturen z.B. Beckhoff
ACS
Wir unterstützen die Integration unserer Systeme in Ihre ACS-Umgebung