XYZ positioning system for automated inspection - wafer / probe cards (clean room) | Stroke 720 x 720 x 100 mm
Inspection and Mikroscopy

782300:148.26.oem
XYZ positioning system for automated inspection - wafer / probe cards (clean room)  | Stroke 720 x 720 x 100 mm - Inspection and Mikroscopy

 

High-precision quality inspection for cleanroom applications

This inspection system (shown here without cover) is specially designed for automated quality control of large wafers, probe cards and printed circuit boards. A high-resolution camera or sensor in Z is movable relative to the sample or carrier on the linear stage. Operation is controlled by a separate motion controller for the three axes.

 

Increased throughput by automated 24/7 inspection

  • Simultaneous inspection of wafers, probe cards and printed circuit boards through travels up to 720 mm
  • Reduced cycle time with speeds up to 150 mm/s and accelerations of 2 m/s2
  • Precise measurement results and enormous quality improvements with repeatability up to 1 µm
  • Low-maintenance 24/7 operation and flexible maintenance due to fast system exchange on the granite structure

Optionally expandable:

  • Various travels up to 720 mm
  • Version for clean room ISO 14644-1 class 2 (up to class 1 on request)
  • Optionally with motorized Z-axis
  • Connections for dust extraction and rotating belt covers
  • With/without frame and base plate made of granite or aluminum
  • Integration into the customer specific application
  • Ready-to-use with pre-configured motion controller incl. exemplary software

    Individual extensions and customizations

    Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests

    Fields of application

    Inspection of large wafers, probe cards and printed circuit boards, AOI, quality assurance, microscopy of large sample, surface inspection, measurement of chip, measurement of objects on complicated geometric shapes

     

    782300:148.26

    X

    Y

    Z

    Standard system usedPMT290-EDLMPMT290-EDLM
    Travel

    [mm; deg]

    820820100

    Repeatability unidirectional

    [µm; deg]

    ± 0.3± 0.3± 1.5

    Repeatability bidirectional

    [µm; deg]

    ± 0.4± 0.7± 2.5

    Positioning speed

    [mm/s; deg/s]

    750750150
    Max. speed

    [mm/s; deg/s]

    15001500300

    Max. Load

    [N]

    150150± 200

    Motor

     

    Ironless Dynamic Linear Motor

     

    Ironless Dynamic Linear Motor

     

     

    AC Servo

    Drive

     

     

     

    Ball Screw

    Feedback

    Linear Scale

     

    Linear Scale

     

     

     

    Änderungen vorbehalten. Werte gelten für Einzelachsen mit unseren Controllern. Hier angegeben sind typische Werte für eine Standardausführung. Durch individuelle Anpassungen und bei genauer Kenntnis Ihrer Anwendung können deutlich verbesserte Werte erreicht werden.


    Angepasstes System für Ihr Gesamtkonzept


    Sie suchen eine technische Lösung für Ihre Anwendung?

    Jetzt den ersten 3D Entwurf in nur wenigen Tagen erhalten:

     

    Francisco Samuel
    Beratung
    Deutschland Süd

    T +49 (0) 351 88585-85
    E-Mail

     

    Tobias Zilian
    Beratung Deutschland Nord, CH, AUS

    T+49 (0) 151 16755537
    E-Mail

     

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