2-XYZ-Phi System with nanometer stability for microassembly and miniaturization
Handling and Production

2-XYZ-Phi System with nanometer stability for microassembly and miniaturization - Handling and Production


Positioning holding accuracy in a nanometer range

This highly stable assembly system for high-precision lasers consists of an 8-axis positioning system and a substructure designed for ISO 5 cleanroom conditions and UV compatibility. It has two independently operating processing heads (Y1, Y2, Z1, Z2, Phi1, Phi2) on a common X-axis. The Phi axes are mounted on the Z axis. This allows 2 components to be positioned exactly in space in relation to each other and held stable over a long period of time in a currentless, uncontrolled standstill.

This system was developed for the assembly of a laser for the Fraunhofer ILT. The institute has designed a laser for measuring the methane concentration in the atmosphere, which will be used in the German-French satellite Merlin in 2021/2022. 


Specially developed for the assembly of miniaturized components

  • High-precision assembly of extremely miniaturized components due to a 3D position stability of 0.05 µm
  • Universally applicable and combinable due to large installation space and maximum freedom or accessibility to the work area
  • Maintenance-free due to air bearing technology and belt drive
  • Manually adjustable via joystick operation or via stepper motor

Special features:

  • Bilatal coating
  • UV compatibility
  • Cleanroom compatibility class ISO 5 (DIN EN ISO 14644)
  • Cleanroom compatible lubricants and cable drag guides

Maximum accessibility for highly sensitive assemblies

This system is available for construction spaces of 600 x 400 x 200 mm³. The workspace in which positioning is to take place is defined as 430 x 220 x 100 mm³ and allows 180° swiveling without colliding with the positioning system (free travel).

The extreme stability is achieved by the combination of weight, use of air bearings and strong AC servos as well as ball screws. In addition to the solutions developed specifically for this special task, PMT160 precision linear stages were used for the Z axes and DT130 from our product portfolio for the rotary axes (Phi). All of the eight axes are driven and positioned by stepper motors. The positioning system complies with the required specifications and has passed all of the customer's acceptance tests with top marks.

Individual extensions and customizations

Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests

Application areas

Ideal for the production of more brilliant lasers, high-precision sensors and better imaging optics, laser microassembly, miniaturization of medical components and devices, aligning and soldering optical components in position, microassembly of pacemakers, cameras, insulin pumps, packaging semiconductors, innovative electronic packages, microprocessors, microchip



2020/10 Press Release Submicrometer Precision for Lasers in Space








[mm; deg]

950350150n *x 360

Position holding accuracy

[µm; deg]

± 0.5± 0.5± 0.5± 0.5

Positioning accuracy

[µm; deg]


Positioning speed

[mm/s; deg/s]


Max. Load





Stepper MotorStepper MotorStepper MotorStepper Motor





Ball Screw

Worm Gear




Open LoopOpen Loop


Änderungen vorbehalten. Werte gelten für Einzelachsen mit unseren Controllern. Hier angegeben sind typische Werte für eine Standardausführung. Durch individuelle Anpassungen und bei genauer Kenntnis Ihrer Anwendung können deutlich verbesserte Werte erreicht werden.

Angepasstes System für Ihr Gesamtkonzept

Sie suchen eine technische Lösung für Ihre Anwendung?

Jetzt den ersten 3D Entwurf in nur wenigen Tagen erhalten:


Francisco Samuel
Deutschland Süd

T +49 (0) 351 88585-85


Tobias Zilian
Beratung Deutschland Nord, CH, AUS

T+49 (0) 151 16755537


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