Vacuum Custom Systems


A three axes magnet free stage system. Strokes are at 200 mm for x and each 10 mm for y and z (vertical). The piezo motors used are a custom design and give the manipulator the ability to move loads of up to 2,5 kg with very high resolution. Outstanding stability in nm range is the main advantage of this system.

Contact Person for Vacuum Custom Systems

Dipl.-Ing. Elger Matthes

Phone: +49 (0) 351 88585-0