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ALL SYSTEMS
STANDARD
TEXT
PDF
OEM Positioning Systems
XYZ Phi inspection system suitable for 12 inch wafers,...
… in the Z-axis using the linear motor-driven KT405-320-
EDLM
mechanical stage. The sensor or camera...
Inspektionssystem für Solar-Wafer
… eines Wafers mit Vakuumchuck Mit einem KT305-
EDLM
und einer darauf befindlichen Dreheinheit wird...
Multi Axes Systems
XZ-Phi system | X linear motor, ball screw | Z DC motor,...
… of high-precision and durable standard axes (PMT160-300-
EDLM
, MT130-50-DC, DT170-TM), which can be...
Standard Axes & Stages
LA340-
EDLM
…LA340-
EDLM
Micrometer linear stage with air bearings The LA340 linear stage, with a width of 340...
LA110-
EDLM
…LA110-
EDLM
Universal, modular XYZ infeed axis The linear axis has been designed as a universal...
PMT160-
EDLM
… a high-resolution linear measuring system, the PMT160-
EDLM
provides increments in the submicro...
KT230-
EDLM
…KT230-
EDLM
Scanning stage for highly dynamic applications This compact XY stage was specially...
KT305-
EDLM
…KT305-
EDLM
Scanning stage for highly dynamic applications This compact XY stage was specially...
KT405-
EDLM
…KT405-
EDLM
Scanning stage for highly dynamic applications This compact XY stage was specially...
KT600-
EDLM
…KT600-
EDLM
Precision giant with the highest repeatability This large precision xy stage is...
KDT600-
EDLM
…KDT600-
EDLM
Scanning stage with large aperture This large precision xy stage is designed for...
KT500-
EDLM
…KT500-
EDLM
Flat, precise and fast The KT500 not only impresses with its very flat and compact...
Controller
FMC 300
… is sui for AC server motor or 3-phase linear motors (DLM,
EDLM
). The controller is also used for...
LA110-
EDLM
…LA110-
EDLM
LA110-
EDLM
…LA110-
EDLM