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OEM Positioning Systems

Double XY linear axis for high-precision adjustment of...

… of 350 mmRepeatability of 1.5 µm under exemely dry cleanroom conditionsEasy maintenance due to a...

XYZ Phi inspection system suitable for 12 inch wafers,...

… ISO 2)-782300:199.26-Universal 4-axis granite gany with cleanroom housing This XYZ Phi...

X Phi positioning system for inspection of wafers,...

… rotary unit with unlimited avel, driven by flat belts.For cleanroom suitability, the cable guides...

XYZ positioning system for automated inspection - wafer /...

… mm-782300:148.26-High-precision quality inspection for cleanroom applications This inspection...

Double XYZ positioning system for automated inspection -...

… high-throughput quality assurance for cleanroom applications This inspection system consists of...

XY aperture adjuster | variable, square high-precision...

… requirement in the optical path due to ula-flat design Cleanroom compatible up to ISO 14644-1...

Assembly system for diagnostic imaging systems (ISO 3...

… operationVirtually particle-free positioning (ISO Class 3 cleanroom requirement)Special,...

2-XYZ-Phi System with nanometer stability for...

… positioning system and a subsucture designed for ISO 5 cleanroom conditions and UV compatibility....

Linear Rotary Actuator (Z-Phi) with integrated motion...

… robust, all-round enclosure, low-emission design for cleanroom processesLow maintenance with...

Multi Axes Systems

XYZ Double inspection portal with travels up to 720 mm |...

… high-throughput quality assurance for cleanroom applications This inspection system consists of...

XYZ inspection portal with travels up to 720 mm | XY...

… motor-782300:148.26-High-precision quality inspection for cleanroom applications This inspection...

Vacuum

LA85

… to integrate for demanding low-emission applications in cleanroom, vacuum and high vacuum. It...

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Submicrometer precision for lasers in space | Astronomy

… clean room by specially trained personnel. "With a cleanroom area of 150 m², we are able to...

Microtiter scanning system for fast analyses | Laboratory...

… without saying that the system is suitable for use in cleanrooms; versions up to Class 6 in...

Precision for the age of light | medical diagnostics

… requirements of our customers, our machines produce in a cleanroom environment," Dr. Kieven tells...

www.steinmeyer-mechatronik.de

Vacuum Technology

… by customized part production, micro-assembly up to cleanroom ISO class 1, measuring...

Application Areas

Wafer and Chip Inspection

… weißer HG More than 100 m2 Cleanroom assembly area cleanroom...

Standard, electron beam, EUV lithography

… process requirements [Translate to English:] apps Cleanroom systems up to Class 1On more...

Laboratory automation

… process requirements [Translate to English:] apps Cleanroom systems up to Class 1On more...

Laboratory microscopy

… process requirements [Translate to English:] apps Cleanroom systems up to Class 1On more...

Imaging technologies

… process requirements [Translate to English:] apps Cleanroom systems up to Class 1On more...

www.steinmeyer-mechatronik.de

Medical and Biotechnology

… by customized part production, micro-assembly up to cleanroom ISO class 1, measuring laboratories...

Application Areas

XYP Positioning Systems

… process requirements [Translate to English:] apps Cleanroom systems up to Class 1On more...

www.steinmeyer-mechatronik.de

Semiconductor Technology

… by customized part production, micro-assembly up to cleanroom ISO class 1, measuring...

Company

Innovations time line

… Positioning systems laboratory / analytics Cleanroom systems Development of the first cleanro...