37 results:
XY system combined with lifitng stage(782300:143.26)  
This system consists of a linear stages PLT320 (X Axis), a linear stage PLT240 (Y Axis) and a lifting stage HT240 (Z Axis). Both linear stages are driven by dynamic linear motors, the lifting table by an AC motor.  
MP105-3(782300:206.26)  
Fast, precise micropositioner HV / UHV / EUV, 20 - 50 mm travel, 0.2 µm repeatability, 1 kg load Vacuum: all ranges HV / UHV / EUV Lubrication liquid up to 10-8 / dry up to 10-11 mbar Max. Bakeout temperature: 120°C Optionally configurable: Available as magnetic, low-magnetic and magnet-free versions Different motor variants: Piezo motor or nanomotion Optionally with high-resolution measuring system for repeatability up to 0.005 µm Can be combined with rotary tables for rotary applications Individual adaptation to the installation situation in the chamber Version for clean room ISO 14644-1 (up to class 1 on request) Optionally with controller FMC400/450 Miniaturized XYZ manipulator for high precision or dynamic applications The manipulator is a highly dynamic 3-axis system for X, Y and Z movement in very limited installation space. Strokes up to 50 mm are realized. The manipulator is equipped with piezo motors and can thus realize positioning increments of a few nanometers for high-precision applications in high vacuum and ultra-high vacuum. Optionally equipped with a nanomotion, it is particularly suitable for highly dynamic and high-precision positioning.   Application areas Precision positioning in very small spaces for laboratory applications, microscopy and semiconductor technology, research in ultra-high vacuum and under extreme ultraviolet radiation, sample preparation, sample scanning, sample handling, camera adjustment, sensor adjustment, materials research, materials analysis, beamline, accelerator, synchrotron, miniaturization  
XYZ Beam Aligner(782300:087.26)  
UHV / DUV / EUV, cleanroom ISO 6, travel 5 x 10 x 5 mm, rep 0.2 µm, load 0.5 kg Cleanroom: variants up to class ISO 6 (higher on request) Vacuum: all ranges HV / UHV / EUV, lubrication liquid up to 10-8 / dry up to 10-11 mbar Max. bakeout temperature: 120°C Options: Available as magnetic, low-magnetic and magnet-free version Can be combined with rotary stages for rotational applications Version for cleanroom, vacuum and beam Customer-specific development with 3D design, prototypes, series production Optional with controller Transfer with sub-micrometer step sizes in the smallest dimensions This positioning system is based on MT53 stages with piezo-drives. Two of those stages are used for xz-motion. Apart from xz another stage of the same make is situated. This design allows for highly compact positioning of samples under extreme beams in an extremely small dimension. The MT53 is equipped with cross roller guides and a piezo drive, which enables step sizes in the nanometer range in very limited dimensions. It can achieve a travel range of 10 mm. Repeatability of +- 0.005 µm is possible with the appropriate linear measuring system. Fields of application Precision positioning in the smallest dimensions for laboratory applications, research in ultra-high vacuum and under extreme ultraviolet beams, 3-axis beam alignment, sample preparation, sample scanning, sample handling, materials research, materials analysis, synchrotron, miniaturization.  
Mobile microscope stand for large plates | Measurement of large, light....  
High-precision, flexible and mobile inspection This stand is used for digital microscopes to inspect large and highly sensitive samples. The very robust stand, consisting of the reliable MT130-50-SM micro stage, is placed together with the microscope on the sample to be inspected. Flexibly adaptable to your microscope and for different samples Ideal for manual, mobile and inexpensive inspection of large samples Enables flexible inspection directly on site at productionEspecially stable for inspection of large sheets as well as glass substrates e.g. solar panelsMeasurement is performed by placing directly on the sample and moves 50 mm in X and YOptions: Versions for clean room ISO 14644-1 on requestStable handle for easy and safe transport Fields of application High-resolution inspection of large printing plates of various printing processes, large, sheets as well as glass substrates e.g. solar panels, chips, transportable measuring microscope, measurement of structures of different sample sizes, inspection of flat products by means of microscope, depth measurement, measurement / inspection of printing plates, foils, films or film assemblies, inspection systems for the printing industry, classification of surface defects  
XXL XYZ Portal with Vacuum Chuck | XY Stepper Motor, Ball Screw,....  
High-precision metrology tasks on 1000 x 1000 mm This positioning system moves a vacuum chuck on an area of 1000 x 1000 mm. The standard system PMT160-SM is fixed to the traverse axis for the customerspecific sensor, which is used for the focus variation. The axes are fully enclosed, which prevents contamination and interference.   Automated inspection in 3-shift operation Ideal for automated surface inspection with focus variation Designed for sample weights up to 50 kg (excluding vacuum stage) Passive vibration damping and decoupling of building vibrations (standard measuring chamber quality class 3 according to VDI 2627) Enormously long lifetime with 1,000,000 full cycles and a maintenance interval of 500,000 full cycles resp. every 2 years Optionally expandable: With linear scale for accuracies up to 0.3 µm Modular system configuration Safety cabinet Special configuration for semiconductors, biotechnology, pharmaceuticals Versions for clean room ISO 14644-1 (up to class 1 on request) Ready-to-use motion control with pre-configured controller incl. sample software Individual solution development with 3D design for the positioning task Individual extensions and customizations Engineering services include the fitting of the systems to your structure and the desired motion control or the completely  
MP53-2-1 Miniature XY-Phi Positioning System, cartesian with Rz....  
Smallest positioning increments in X and Y and rotation around Z Phi-XY System with Piezo Motor Small manipulator for xy movement and rotation. Linear travel is 10 mm and ± 5 degrees in rotation. Extremely high resolution in the range on nm through piezo drives. The rotation is being realized by a linear stage acting upon a rotary bearing by means of a flexible coupling. Fixed joint for aligning parts The three-axis system is intended for aligning parts and samples. As only small paths of a few millimetres or degrees are sufficient for such corrective movements, a rotary movement can be generated with a linear stage if it transmits its movement to an otherwise passive rotary stage by means of a solid-state joint. The advantage of such a solid-state joint is that it transfers the precision of the linear stage completely to the rotary stage. If the deflection remains below 5 degrees, the stiffness of this joint also remains sufficient to transmit movements in the nanometer range in the tensile and compressive directions. Suitable for use in the semiconductor industry Depending on the resolution of the measuring system installed in the table, repeat accuracies of at least 30 nm can be achieved. Please note that a measuring system with a higher resolution than the standard version specified here must be used for this. The manipulator is of particular interest in automated micro-assembly systems or for experimental set-ups in research. The manipulator is very well suited for aligning wafers in the semiconductor industry. The manipulator is also suitable for use in a vacuum and is available in a corresponding version.  
XYZ industrial portal (positioning in case of dust, radiation,....  
Modular, industrial-grade 3-axis Positioningsystem The XY combination with separate Z Stage is composed of the high-precision and durable standard linear stages PLT320 (X-axis), PLT240 (Y-axis) and LTP80 (Z-axis). This combination is suitable for the flexible and modular design of production systems / inline processes and can be optionally extended with a rotary stage. Ideal for the set-up and expansion of industrial machinery (dust, radiation, temperature) Large travels up to 1000 x 600 x 100 mm High loads up to 35 kg Options: Rotary motions in combination with DT165 Adaptation to the process: aperture, sample holder, extension of the Z-axis Individual design with frame, vibration isolation, housing Individual solution development with 3D design for the positioning task Individual extensions and customizations Engineering services include the fitting of the systems to your structure and the desired motion control or the completely individual solution development with 3D design for the application-specific positioning task. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests.   Fields of application Positioning in laser processing, welding system, inline process positioning, inspection of long samples, positioning systems in industrial environments under dust, radiation, temperature fluctuations  
Heavy-duty linear lifting positioning system | XYZ profile rail, ball....  
Orthogonal XYZ combination of three linear axes This combination combines three linear stages from the standard PLT240 series and provides high repeatability in microstepping motion. The spindle drive in combination with a magnetic brake enables vertical applications with high loads on a small space. Ideal for vertical applications with limited space Large travel range up to 500 x 200 x 500 mm High loads up to 100 kg Optionen: Rotary motions in combination with DT240 Adaptation to the process: travels, sample holder, frame, housing Combination of linear motor and spindle drive for dynamic applications Individual solution development with 3D design for the positioning task Individual extensions and customizations Engineering services include the fitting of the systems to your structure and the desired motion control or the completely individual solution development with 3D design for the application-specific positioning task. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests.   Fields of application Positioning for imaging processes, space-saving positioning systems with large Z travel, vertical inspection systems, automatic optical inspection (AOI), automation for counterfeit detection, laser technology  
X Phi system for the positioning of optical lenses, cylinders e.g.....  
Excellent stability for enormous resolutions This X-Phi positioning system consists of high-precision and durable standard axes of the PMT160 linear stage and, for rotation, the DTS130-HM. It is ideal for measuring applications in which the specimen is moved precisely into measuring position and thus no additional feed axis is required.   Highly precise and reliable measurement results Ideal for optical measurement of round parts e.g. wafers, optics Saves the additional purchase of a loading axis due to high-precision rotary movements with stroke High repeatability up to 0.0017 Moves 1.9 µm precisely with X into the measuring position Optionally configurable: Travels up to 300 mm Base plate made of granite or aluminum Available with internal scale (270 mm) Can be combined with other rotary stages, e.g. DT200 Versions for clean room ISO 14644-1 possible Immediate use with pre-configured controller incl. exemplary software Individual extensions and customizations Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we like to adapt the systems to the environmental requirements of your application e.g.: dust, radiation, temperature, Precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, test protocol, life tests   Fields application Ideal for two-dimensional optical detection of roughness, structure mapping, surface structures, laboratory application, semiconductor inspection, optical inspection systems, quality assurance, motion system stylus gauge  
XY-Z-Phi positioning system with 66 mm aperture (clean room) | XY....  
Precise and highly dynamic for samples up to 150 mm / 6" The system consists of two linear stages PLT320 (X and Y Axes), a lifting stage HT160 (Z Axis) and a rotary stage DT200 (Phi Axis). Ideal for flexible set-up and expansion of cleanroom systems High accuracy up to 0.4 µm / 0. 004° High accelerations and speeds up to 1000 mm/s Outstanding low heat emission at frequent start and stop phases Designed for maintenance-free 24/7 operation in clean room environments Options: Various, high-resolution measuring systems Adaptation to the process: travel range, adaptation plate, chuck, base plate, frame, enclosure, safety concept Individual solution finding with 3D design for the positioning task Individual extensions and customizations The engineering services include the adaptation of the systems to your structure and the desired controls or the completely individual solution finding with 3D design for the application-specific positioning task. In addition, we develop prototypes and are happy to adapt the systems to the environmental requirements of your application, e.g. particle emission, radiation, temperature, precision special parts production, working height, collision protection, safety concept, compensation factor and filter, sensor holder, brake, decoupling, special lubrication, special colors, holder, adapter, special motors with pharmaceutical approval, extensive documentation, test protocol, lifetime tests   Fields of application Low-particle XYZ-R linear lift rotary positioning, e.g. for cutting systems, inspection systems, semiconductor production, wafer dicing & scribing (silicone, GaAs, InP, silica, glass, etc.), optics, photonics, laser technology  
XZ System for Laboratory and Wafer Inspection | Ball Screw, DC Motor,....  
High precision and modular 3-axis system The XZ combination consists of the high-precision and durable standard linear axes of the PMT160. This combination is suitable for all applications requiring perfect flatness, smallest tolerances for yaw, and smooth running behavior. The XZ system is ready to use with controller as well as software and operates with reliable parameters. Flexible, instantly operational and tested Ideal for setting up and expanding of your applicationHighly precise repeatability up to 0.4 µmSmallest steps and highest reliability at comparatively high positioning speed of 50 mm/sPerfect flatness of ± 1 for positioning medium loads up to 5 kgOptional expandable:Different travels per axis from 50 - 300 mm Rotational movements in combination with DT130 or DT200Various motor variants: DC motor, stepper motor, linear motor and nanomotionImmediate use with pre-configured controller incl. exemplary softwareVersions for clean room ISO 14644-1 Individual extensions and customizations Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests Fields of application wafer inspection, layer measurement, laboratory test systems, automatic optical inspection (AOI), 3D imaging, microscopy, imaging systems, multi-axis system for laboratory applications, quality assurance, 3-axis sensor measurement, wafer inspection, semiconductor quality insurance  
XYZ system with controller | flexible configuration | XY ball screw,....  
High precise and modular 3-axis system This XY combination with separate Z-vertical unit consists of the high-precision and durable standard linear axes of the PMT160. This combination is suitable for all applications requiring perfect flatness, smallest tolerances for pitch and yaw, and smooth running behavior. The XYZ system is ready to use with controller as well as software and operates with reliable parameters.   Highly reliable and flexibly configurable Ideal for setting up and expanding of your application Highly precise repeatability up to 0.3 µm Smallest steps and highest reliability at comparatively high positioning speed of 30 mm/s Perfect flatness of ± 1 for positioning medium loads up to 150 N Flexible configuration: Different travels per axis from 50 - 300 mm Rotational movements in combination with DT130 or DT200 Various motor variants: DC motor, stepper motor, linear motor and nanomotion Immediate use with pre-configured controller incl. exemplary software Versions for clean room ISO 14644-1 Individual extensions and customizations Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests Fields of application In-vitro diagnostics, laboratory test systems, automated optical inspection (AOI), 3D imaging, microscopy, imaging systems, multi-axis system for laboratory applications, quality assurance, 3-axis sensor measurement  
XY-Phi positioning system with 66 mm aperture (clean room) | XY linear....  
Precise and highly dynamic for samples up to 150 mm / 6" The XY Phi positioning system consists of two PLT165 linear stages (X and Y axes) and a DT200 rotary stage (Phi axis). The dust and particle protection in industrial environments is ensured by the protected housing and metal strip cover. Ideal for flexible set-up and expansion of cleanroom systems High accuracy up to 0.4 µm / 0. 004° High accelerations and speeds up to 1000 mm/s Outstanding low heat emission at frequent start and stop phases Designed for maintenance-free 24/7 operation in clean room environments Options: Various, high-resolution measuring systems Adaptation to the process: travel range, adaptation plate, chuck, base plate, frame, enclosure, safety concept Individual solution finding with 3D design for the positioning task Individual extensions and customizations The engineering services include the adaptation of the systems to your structure and the desired controls or the completely individual solution finding with 3D design for the application-specific positioning task. In addition, we develop prototypes and are happy to adapt the systems to the environmental requirements of your application, e.g. particle emission, radiation, temperature, precision special parts production, working height, collision protection, safety concept, compensation factor and filter, sensor holder, brake, decoupling, special lubrication, special colors, holder, adapter, special motors with pharmaceutical approval, extensive documentation, test protocol, lifetime tests   Fields of application Low-particle linear rotary positioning, e.g. for cutting systems, inspection systems, semiconductor production, wafer dicing & scribing (silicone, GaAs, InP, silica, glass, etc.), optics, photonics, laser technology  
XYZ positioning system for laboratory inspection | ball screw, DC....  
High-precision 3-axis system for short travels This XYZ combination consists of the high-precision and durable standard linear axes of the PMT160 which are mounted with an adapter bracket on a KLT310 xy stage. This allows positioning along three linear axes. This combination is suitable for all applications that require perfect flatness, the smallest tolerances for pitch and yaw, and smooth running. The XYZ system is ready to use with controller and operates with reliable parameters.   Flexible, ready to use and tested Ideal for setting up and expanding your high-precision measurement technology Very high repeatability up to 0.3 µm Smallest step sizes and highest reliability at comparatively high top speed up to 50 mm/s Perfect flatness of ± 0.5 when positioning medium loads up to 150 N Optional expandable: Travels up to 100 mm Different motor variants: DC motor or stepper motor Versions for clean room ISO 14644-1 Immediate use with pre-configured controller incl. exemplary software Individual extensions and customizations Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests Fields of application Measurement setup, measuring equipment, mold measurement, surface measurement, coordinate measurement, sample inspection, positioning of measuring fibers, special machine construction, inspection of optical components/parts, assembly and connection techniques in silicon photonics  
XY Laboratory Analytics System with holder for sensor and XY stage....  
2-axis system with sensor holder for high-resolution laboratory analytics This XY system on a granite gantry consists of the high-precision and durable KDT380-DC XY stage with transmitted light. A sensor or camera can be attached to the upper granite for high-precision measurement tasks. This combination is suitable for all applications where µm stability is required for high resolution and detailed imaging. The XZ system is ready to use with controller and operates with reliable parameters.   High-precision analysis of the finest details Ideal for set-up and expansion of high-resolution analysis, scanning, microscopy and measurement tasks Attachment for a sensor or camera High repeatability up to 2 µm µm stability for highest resolutions and detailed imaging Perfect flatness of 0.3 µm for medium loads up to 5 kg Optionally configurable: Different motor variants: DC motor or stepper motor Can be combined to a XY-Z positioning system (e.g. LA85, MT130) Versions for clean room ISO 14644-1 Immediate use with pre-configured controller incl. exemplary software Individual extensions and customizations Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests Fields of application Analysis of molecular structures, surface profiling, profile measurement and layer thickness measurement of biological and synthetic samples including general and special chemistry and specific proteins, observation of surface changes.  
XYZ System for Laboratory and Wafer Inspection | Ball Screw, DC Motor,....  
High precision and modular 3-axis system This XY combination with separate Z-vertical unit consists of the high-precision and durable standard linear axes of the PMT160. This combination is suitable for all applications requiring perfect flatness, smallest tolerances for pitch and yaw, and smooth running behavior. The XYZ system is ready to use with controller as well as software and operates with reliable parameters. Flexible, instantly operational and tested Ideal for setting up and expanding of your application Highly precise repeatability up to 0.5 µm Smallest steps and highest reliability at comparatively high positioning speed of 50 mm/s Perfect flatness of ± 0.5 µm for positioning medium loads up to 150 N Optional expandable: Different travels per axis from 50 - 300 mm Rotational movements in combination with DT130 or DT200 Various motor variants: DC motor, stepper motor, linear motor and nanomotion Immediate use with pre-configured controller incl. exemplary software Versions for clean room ISO 14644-1 Individual extensions and customizations Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests Fields of application wafer inspection, layer measurement, laboratory test systems, automatic optical inspection (AOI), 3D imaging, microscopy, imaging systems, multi-axis system for laboratory applications, quality assurance, 3-axis sensor measurement  
XYZ positioning system for high precision automated optical inspection....  
Highly stable non-contact optical measurement in the submicrometer range This 3-axis positioning system was developed for high-precision measuring applications in those cases where the XY stage moves the object being measured with extremely low pitch and yaw errors to the sensor or camera on the Z-axis. This is the case, for example, when measuring parts or recording 3D profiles even on tall parts. The XYZ system consists of the durable standard axes of the KT310 cross table and the PMT160 linear table on granite gantry.   Highly accurate and consistent measurement results  Ideal for high-precision automated inspection processes High repeatability up to 0.3 µm Reduction of measurement errors to below 3 µm Flexibly configurable: Travels up to 150 mm Optionally in different measuring system resolutions Rotational movements in combination with DT200 Flatness-independent interface as well as adjustment options Different motor variants: DC motor or stepper motor Versions for clean room ISO 14644-1 Ready-to-use control with pre-configured controller incl. sample software Individual extensions and customizations Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests Fields of application Laboratory automation, AOI, capturing 3D profiles, 3-printing, surface inspection, inspection systems, tool measurement, coordinate metrology, micromachining or in optics  
XY-Phi positioning system with 66 mm aperture (clean room) | XY linear....  
High-precision positioning for samples up to 150 mm / 6" The system consists of two linear stages PLT240 (X and Y Axes) and a rotary stage DT53, optional DT130 (Phi Axis). Both linear stages are driven by dynamic linear motors, the rotary stage by a DC motor. Ideal for flexible set-up and expansion of cleanroom systems High accuracy up to 0.4 µm / 0. 004° High accelerations and speeds up to 1000 mm/s Outstanding low heat emission at frequent start and stop phases Designed for maintenance-free 24/7 operation in clean room environments Options: Various, high-resolution measuring systems Structure with Z-axis, traverse, frame and housing Linear motor with temperature monitoring Adaptation to the process: travel range, adaptation plate, chuck, base plate, frame, enclosure, safety concept Individual solution finding with 3D design for the positioning task Individual extensions and customizations The engineering services include the adaptation of the systems to your structure and the desired controls or the completely individual solution finding with 3D design for the application-specific positioning task. In addition, we develop prototypes and are happy to adapt the systems to the environmental requirements of your application, e.g. particle emission, radiation, temperature, precision special parts production, working height, collision protection, safety concept, compensation factor and filter, sensor holder, brake, decoupling, special lubrication, special colors, holder, adapter, special motors with pharmaceutical approval, extensive documentation, test protocol, lifetime tests   Fields of application Low-particle linear rotary positioning, e.g. for cutting systems, inspection systems, semiconductor production, wafer dicing & scribing (silicone, GaAs, InP, silica, glass, etc.), optics, photonics, laser technology  
XYZ system for inspection and quality control | XY DC motor, cross....  
High-precision inspection with minimum error rate The positioning system enables positioning along three linear axes. In this unit, a PMT160 linear stage is mounted on a KT470 cross table with an adapter bracket. It achieves low runout errors, in terms of straightness and flatness, which are achieved by using crossed rollers. This results in above-average repeatability, which is the basis for good compensation. This enables extremely high accuracy for measurement applications.   Ideal for optical quality control Very high runout accuracy and repeatability up to 0.3 µm Positioning of loads up to 150 N with a cost-effective drive High speeds up to 50 mm/s Reduction of random errors to a minimum Easy integration and flexible combination with existing camera systems and sensors   Optional expandable: Different travels in the Z-axis from 50 - 300 mm    Various motor variants: DC motor or stepper motor Immediate use with pre-configured controller incl. exemplary software Versions for clean room ISO 14644-1 Individual extensions and customizations Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests Fields of application Fast scanning applications in start-stop mode e.g. single measurements, automatic optical inspection (AOI), 3D imaging, microscopy, imaging systems, laboratory applications, quality assurance, 3-axis sensor measurement, wafer inspection  
XYZ positioning system for automated inspection - wafer / probe cards....  
High-precision quality inspection for cleanroom applications This inspection system (shown here without cover) is specially designed for automated quality control of large wafers, probe cards and printed circuit boards. A high-resolution camera or sensor in Z is movable relative to the sample or carrier on the linear stage. Operation is controlled by a separate motion controller for the three axes. Increased throughput by automated 24/7 inspection Simultaneous inspection of wafers, probe cards and printed circuit boards through travels up to 720 mmReduced cycle time with speeds up to 150 mm/s and accelerations of 2 m/s2Precise measurement results and enormous quality improvements with repeatability up to 1 µmLow-maintenance 24/7 operation and flexible maintenance due to fast system exchange on the granite structureOptionally expandable:Various travels up to 720 mmVersion for clean room ISO 14644-1 class 2 (up to class 1 on request)Optionally with motorized Z-axisConnections for dust extraction and rotating belt coversWith/without frame and base plate made of granite or aluminumIntegration into the customer specific applicationReady-to-use with pre-configured motion controller incl. exemplary software Individual extensions and customizations Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests Fields of application Inspection of large wafers, probe cards and printed circuit boards, AOI, quality assurance, microscopy of large sample, surface inspection, measurement of chip, measurement of objects on complicated geometric shapes  
XYZ positioning system for optical inspection of wafers, PCBs, probe....  
Highly stable non-contact optical measurement. This XY combination has a separate Z-vertical unit to mount a custom microscope, camera or sensor. The KT310 cross-stage with stepper motor on the granite plate moves the wafer under inspection to the microscope with high precision and enables stable and high-resolution imaging. Its concept with internal motors, cross roller guides and high-precision ball screws enables outstanding precision with optimum use of the installation space.  High-precision analysis of the smallest details  Ideal for optical inspection of wafers, printed circuit boards and probe cardsEasily apaptable to various custom microscopes, cameras or senorsHigh precision surface inspection of wafers up to 200 x 200 mm Low maintenance and with optimized price-performance ratio due to stepper motor driveOptional extensions:Other travels and lengthsWith/without frame and base plate made of granite or aluminumVersions ISO 14644-1 (up to class 1 on request) e.g. with enclosure and with exhaust systemIndividual solutions for cable routingAdapted vibration decoupling by means of damping rubber layer or pneumatic dampersIntegration into the customer-specific overall application Individual extensions and customizations Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests Fields of application Inspection and microscopy of wafers, chips, die, pins, bonding, printed circuit boards, solar cells, solar panels, laser, surface inspection, examination of deposits, scratches, irregularities on the surface  
XYZ inspection portal | XY linear motor, profile rail | Z ball screw,....  
High-precision quality inspection for cleanroom applications This inspection system (shown here without cover) is specially designed for automated quality assurance. The positioning system allows positioning along two linear axes. A high-resolution camera or sensor is moved relative to the sample to inspect geometries, perform measurements and document special quality features. The system is controlled by a separate motion controller for three axes.   Automated and low-maintenance 24/7 inspection Simultaneous inspection by travels up to 720 mm Reduced cycle time with speeds up to 150 mm/s and accelerations of 2 m/s2 Precise measurement results and enormous quality improvements with repeatability up to 1 µm Low-maintenance 24/7 operation and flexible maintenance concept due to fast system exchange on the granite structure Optionally expandable: Various travels up to 720 mm Version for clean room ISO 14644-1 class 2 (up to class 1 on request) Optionally with motorized Z-axis Connections for dust extraction and rotating belt covers With/without frame and base plate made of granite or aluminum Integration into the customer specific application Immediate use with pre-configured controller incl. exemplary software Individual extensions and customizations Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests   Fields of application Automated Inspection in clean rooms e.g. 300 mm large wafers, probe cards and printed circuit boards, AOI, quality assurance, microscopy of large sample, surface inspection, measurement of chip, measurement of objects on complicated geometric shapes  
XZ-Phi system | X linear motor, ball screw | Z DC motor, cross roller....  
High-precision measuring system with liner axis and rotary stages This X-Z-Phi multi-axis positioning system consists of high-precision and durable standard axes (PMT160-300-EDLM, MT130-50-DC, DT170-TM), which can be ideally combined for a high-precision measurement setup. For horizontal movements, the PMT160-300-EDLM enables the smallest step sizes in the sub-micrometer range in addition to high positioning speeds. To exploit the full accuracy of the linear scale, it lies in alignment with the distance to be measured (Abbé's comparator principle). The scale sits separately from the table radially in front of the rotary table at the height of the part to be measured. Highly precise and reliable metrology Ideal for setting up your high-precision metrology systems Measuring system resolutions in the submicrometer range up to 0.1 µm / 0.0001° High precision repeatability up to 0.3 µm Finest rotational movements up to 0.001° Low maintenance with extremely long service life Flexibly configurable: Different motor variants: DC motor, stepper motor, linear motor and nanomotion Immediate use with pre-configured controller incl. exemplary software Versions for clean room ISO 14644-1 Individual extensions and customizations Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests Fields of application Analytical instruments, particle analysis, layer measurements, laboratory test systems, surface measurements, characterization of samples, measurements in the micrometer and nanometer range, sample preparation, rotatory and linear measurement technology for small samples, quality inspection  
XYZ Multi-axis gantry system | XY linear motor, profile rail | Z ball....  
High-speed multi-axis gantry system This versatile adaptable gantry for overhead applications is freely configurable in number of axes, size and drive from the standard stages of the PLT series. Three or more customer-specific processing heads, cameras, sensors, etc. can be adapted to the enhanced traverse. Flexible and automated 24/7 operation Ideal for integrated inline quality control, high-speed pick-and-place tasks and combined applications Three freely configurable axes on the crosshead for individual all overhead applications High throughput due to travels of 500 x 700 x 100 mm, expandable to 1000 mm Outstanding high repeatability up to 0.4 µm Uncoupling between the gantry axes and the crosshead for easy controllability via motor encoders and avoidance of overdetermination Optionally expandable: Expansion with additional Z-axes for integration of further processing heads, cameras or sensors Adaptation of the traverse paths for the production area Safety enclosure Base plate made of granite, aluminum or other materials Versions for clean room ISO 14644-1 (up to class 1 on request) Integration into the customer specific overall application Bus-capable fully interpolating industrial controller for integration into almost any automation environment Individual extensions and customizations Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests Fields of application Setup and expansion of integrated processes, automated optical inspection (AOI), automated assembly, quality assurance, wafer inspection, 3D printing, pick-and-place applications, inline measurement  
XYZ gantry for highly dynamic laser applications | XY linear motor,....  
Highly dynamic XYZ positioning system for laser applications This gantry allows highly dynamic motions over an area of 1200 x 1400 mm. The custom processing head or sensor on Z-axis moves quickly, continuously over the carriers on the granite. The profiled rail guides are mounted directly on the granite to provide optimum running characteristics for enormously repeatable sub-micron results. The gantry design makes integration into cycle lines and lining up multiple such portals easily possible.   High throughput with consistent quality Ideal for high-precision and dynamic applications e.g. laser joining, laser micro applications in medical technology Very large travel ranges of 1200 x 1400 x 200 mm Reliable and consistent quality due to high-precision positioning with a repeatability of up to 0.8 µm Integrated linear motors guarantee high accelerations and speeds with simultaneous high precision Optionally expandable: Stackable system design Adaptation of travels, length combination, cabling and motion control Base plate made of granite or aluminum Special configuration for biotechnology, medical technology, pharmaceuticals, semiconductors Versions for clean room ISO 14644-1 (up to class 1 on request) Immediate use with pre-configured motion controller incl. exemplary software Individual extensions and customizations Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests Fields of application Highly dynamic laser applications, microlaser joining, microlaser welding, laser micromachining, microlaser cutting, biomedical laser, laser microcutting in medical technology  
XY-2Z 4-Axis Gantry with aperture | XY linear motor, profile rail, air....  
Gantry with aperture and bilateral sensor positioners This XYZ gantry positioning system allows high precision bilateral inspection processes with 2 custom sensors / microscopes each for different metrology applications. The first Z-axis is located on the stationary traverse, the second sensor / microscope is mounted on the Z-axis below the aperture. The air-bearing sample holder moves the sample in XY direction to the aperture with the two sensors on the Z-axes, each of which can be adjusted in height of 100 mm.   For automatic bilateral inspection processes Ideal for spot differential height measurements in continuous motion Double-sided Z-sensor positioners for the 70 x 100 mm aperture Vibration damped design with excellent processing values for repeatability up to 1µm Reduction of emission due to air-bearing sample carriers Outstanding lifetime and maintenance-free 24/7 operation Optionally configurable: Adaptation of travel ranges, carriers and length combinations Safety enclosure and different base plates Wipeable, chemical-resistant surfaces ISO 14644-1 versions (up to class 1 on request) Individual solution development with 3D design for the positioning task Individual extensions and customizations Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests Fields of application Differential height measurement on contours of chips in PCB panels, automatic optical inspection e.g. printed circuit boards, wafer structures, microelectronics, microlenses, thin film solar cells, test systems, creation of 3D surface profiles, profile measurement, layer thickness measurement, observation of surface changes, roughness, curvature of surfaces, 3D white light interferometry, inspection of medical implants  
Assembly system for diagnostic imaging systems (ISO 3 clean room) | XY....  
New solutions for imaging diagnostics These axes are used in alignment machines and are part of an optical measuring and image evaluation system. This allows components and their position to be measured. By precisely approaching and holding the positions, an optical image recognition system can measure distances and provide feedback to other motion systems that adjust and finalize the position to existing systems. Robust Industrial XY System with Metrology Accuracy Particles and other contaminants cannot get onto the positioned workpieceConsistent product quality at high throughput with speeds up to 250 mm/sExtremely high durability - ideal for continuous industrial operationVirtually particle-free positioning (ISO Class 3 cleanroom requirement)Special, hermetically sealed motors with pharmaceutical approvalOptionally expandable:Various travels per axisVersions ISO 14644-1 (up to class 1 on request)Immediate use with pre-configured controller incl. exemplary software Suitable for demanding environmental conditions Particles and other contaminants cannot get onto the positioned workpiecePenetration of cleaning agents during disinfection and cleaning is excluded, for easier cleaning the wiring has been adaptedThe parts accessible from the outside are fully nickel-plated and wipeableInsensitivity to all vibrations and environmental influences due to the use of a stiff ball screw drive Individual extensions and customizations Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests Fields of application Assembly of medical devices, Alignment of optical components as well as cameras, pacemakers and insulin pumps, High-resolution imaging diagnostics, Dental camera assembly system, Optical image recognition, Precise alignment of assemblies, High-precision assembly systems, Miniaturization, Production suitable for pharmaceuticals References 2021/03 Press release Precision for the Age of Light  
9-axis microscopy station for high-resolution, automated imaging | XYZ....  
Automated and high-resolution imaging from every angle This 9-axis positioning system makes it possible to view samples from all possible angles under microscopes or high-resolution cameras, such as injection nozzles, stents, small cutting tools, cannulas and other rotationally symmetrical parts. It consists of the robust and rigid standard components of the KLT310 with PMT160 for XYZ, to which different types of microscopes can be attached. The light, compact and stable KT180 XY offset stage is used for the swivel axis, with a further swivel axis with rotary axis and mounting chuck on top. Ultra-fine details even with short process times Ideal for the development and setup of high-precision 3D processes in medicine, biotechnology and semiconductor technologyUltra-fine imaging of details and higher zoom levels due to stability in the µm rangeShort cycle times with high speeds up to 35 mm/sVery high repeatability of results with up to 2.5 µm and finest rotational movements up to 0.02°Low maintenance with exceptionally long service life due to long-term reliable standard axesOptional expandable:Configurable for clean room ISO 14644-1 (up to class 1 on request)Different motor variants: DC motor, stepper motor and linear motorCustomizable for further travels and various test objectsOptional with pre-configured controller incl. exemplary software for immediate use Individual extensions and customizations Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests Fields of Application Production, inspection / quality assurance of medical consumables and surgical tools (cannulas, lancets, scalpels, infusion accessories, tube connectors), alignment and inspection of optical components (lenses, prisms), production and quality control of precision components (nozzles, needles, valves)  
9-axis positioning system with travels up to 100 mm | XYZ DC motor,....  
Automated and high-resolution imaging from every angle This 9-axis positioning system makes it possible to view samples from all possible angles under microscopes or high-resolution cameras, such as injection nozzles, stents, small cutting tools, cannulas and other rotationally symmetrical parts. It consists of the robust and rigid standard components of the KLT310 with PMT160 for XYZ, to which different types of microscopes can be attached. The light, compact and stable KT180 XY offset stage is used for the swivel axis, with a further swivel axis with rotary axis and mounting chuck on top.   Ultra-fine details even with short process times Ideal for the development and setup of high-precision 3D processes in medicine, biotechnology and semiconductor technology Ultra-fine imaging of details and higher zoom levels due to stability in the µm range Short cycle times with high speeds up to 35 mm/s Very high repeatability of results with up to 2.5 µm and finest rotational movements up to 0.02° Low maintenance with exceptionally long service life due to long-term reliable standard axes Special features: Configurable for clean room ISO 14644-1 (up to class 1 on request) Different motor variants: DC motor, stepper motor and linear motor Customizable for further travels and various test objects Optional with pre-configured controller incl. exemplary software for immediate use Individual extensions and customizations Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests Fields of Application Production, inspection / quality assurance of medical consumables and surgical tools (cannulas, lancets, scalpels, infusion accessories, tube connectors), alignment and inspection of optical components (lenses, prisms), production and quality control of precision components (nozzles, needles, valves)  
XYZ Phi inspection system suitable for 12 inch wafers, printed circuit....  
Universal 4-axis granite gantry with cleanroom housing This XYZ Phi positioning system can be used for various test and inspection processes in semiconductor and electronics manufacturing up to cleanroom class ISO 2. Due to the design of the travels up to 320 x 320 mm in XY, it is suitable for all standard wafer sizes up to 12 inches. Samples are manipulated with high precision to a laser, sensor or camera in the Z-axis using the linear motor-driven KT405-320-EDLM mechanical stage. The sensor or camera is adjusted in vertical movement (maximum 50 mm) with the PMT160-050-DC-R/L precision measuring stage, which can optionally be added with a swivel unit. High-precision testing in demanding cleanrooms Ideal for demanding test and inspection processes in semiconductor technology, biotechnology and the pharmaceutical industry Fast adaptation to different measurement and testing tasks High-precision measurement with repeatability up to 0.3 µm at high speeds up to 100 mm/s Safety concept with protective cover Emission-free up to clean room ISO class 2 Delivery of the system with granite base on dampers, steel frame incl. control complete with protective hood and painted housing Optionally expandable: ISO 14644-1 versions (up to class 1 on request) Swivel arm for sensor with rotary axis DT200 Base plate made of granite or aluminum Other travels and different samples Adaptable for integration into automated processes Immediate use with pre-configured controller incl. exemplary software Individual extensions and customizations Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests   Fields of application Assembly / inspection / quality assurance of 12 inch wafers, chipping / crack / defect detection, surface inspection, layer thickness measurement with one sensor, inspection of chips, dies, pins, bonding, printed circuit boards, solar cells  
XYZ positioning system for automated inline wafer inspection e.g.....  
Automated XYZ inline wafer inspection with large sample capacity This inspection system is specially designed for automated quality control of large and flat carrier up to 50 kg. The positioning system allows simultaneous positioning of sensor in Z and specimen in XY on a very compact footprint. The robust system also allows the use of heavy sensors or camera systems up to 20 kg in Z. The spindle drive, in combination with a spindle brake, guarantees optimum self-holding, so that a vertical position can be maintained in the de-energized state. The low-emission all-round enclosed system is also suitable for harsh industrial environments under dust and smoke. A suspension system has been attached to the granite for cable routing. Compact design with optimized price/performance ratio Ideal for surface inspection of large carriers up to 650 x 650 mm Precise measurement with repeatability up to 2 µm Good price-performance ratio due to drive with stepper motor Strong and robust Z-axis for sensors, microscopes and cameras up to 20 kg Suitable for industrial environments e.g. dust, smoke Optionally expandable: Various travels up to 1000 mm With/without frame and base plate made of granite or aluminum Versions ISO 14644-1 (up to class 1 on request) e.g. with enclosure and with exhaust system Individual solutions for cable routing Adapted vibration decoupling by means of damping rubber layer or pneumatic dampers Immediate use with pre-configured controller incl. exemplary software   Individual extensions and customizations Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests Fields of application Automated inline inspection and microscopy of large samples e.g. wafers, chips, die, pins, bonding, printed circuit boards, solar cells, solar panels, laser, layer thickness measurement, AOI, quality assurance in dusty fuming environments, surface inspection, investigation of deposits, scratches, surface irregularities.  
XYZ positioning system for automated inline wafer inspection e.g.....  
Automated XYZ inline wafer inspection with large sample capacity This inspection system is specially designed for automated quality control of large and flat specimens up to 50 kg. The positioning system allows simultaneous positioning of sensor in Z and specimen in XY on a very compact footprint. The robust system also allows the use of heavy sensors or camera systems up to 20 kg in Z. The spindle drive, in combination with a spindle brake, guarantees optimum self-holding, so that a vertical position can be maintained in the de-energized state. The low-emission all-round enclosed system is also suitable for harsh industrial environments under dust and smoke. A suspension system has been attached to the granite for cable routing. Compact design with optimized price/performance ratio Ideal for surface inspection and coating thickness measurement of large samples up to 650 x 650 mm Precise measurement with repeatability up to 2 µm Good price-performance ratio due to drive with stepper motor Strong and robust Z-axis for sensors up to 20 kg Suitable for industrial environments e.g. dust, smoke Optionally expandable: Various travels up to 1000 mm With/without frame and base plate made of granite or aluminum Versions ISO 14644-1 (up to class 1 on request) e.g. with enclosure and with exhaust system Individual solutions for cable routing Adapted vibration decoupling by means of damping rubber layer or pneumatic dampers Immediate use with pre-configured controller incl. exemplary software   Individual extensions and customizations Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests Fields of application Automated inline inspection and microscopy of large samples e.g. wafers, chips, die, pins, bonding, printed circuit boards, solar cells, solar panels, laser, layer thickness measurement, AOI, quality assurance in dusty fuming environments, surface inspection, investigation of deposits, scratches, surface irregularities.  
XYZ positioning system for inspection & metrology by laser, optics....  
µm-accurate positioning and nanometer stability during measurement The gantry design enables highly dynamic movements over an area of 1,200 x 1,400 mm (adapted to the application and the available space) with a repeatability of 0.3 µm, thus guaranteeing high throughput with consistent quality. In the horizontal XY level, integrated linear motors ensure process speeds of 500 mm/s, while on the vertical Z axis the AC servo achieves values of up to 200 mm/s. The customized processing head or sensor on the Z-axis moves quickly and smoothly over the carriers on the granite. The traverse is suitable for loads up to 10 kg, while the height can vary up to 500 mm depending on the application and component height.   Variety of individual customization options Ideal base for inspection systems in semiconductor or optics manufacturing Very large travels of 1200 x 1400 mm Highly dynamic for maximum speeds of up to 1000 mm/s Integrated linear motors guarantee high accelerations and speeds with simultaneous high precision High-precision and long-life drive in Z through a grinded precision ball screw Easy integration or connection to automated handling systems Additional casing with integrated extraction or housing for applications up to clean room class ISO 6 Optionally expandable: Stackable system design Adaptation of travels, length combination, cabling and motion control Combination with lifting stages and/or rotary stages for the inspection of complex geometries Customized interfaces available for semi-automated or highly-automated semiconductor fabs Versions for clean room ISO 14644-1 (up to class 1 on request) Immediate use with pre-configured motion controller incl. exemplary software Individual extensions and customizations Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests Fields of application High-dynamic laser applications, quality inspection, metrology, process monitoring, wafer inspection, bond inspection, optical microscopy, surface measurement, microlaser joining, microlaser welding, laser micromachining, microlaser cutting  
XY-2Z 3D printing gantry (clean room) | XY linear motor, linear....  
XY-2Z positioning system for high-precision 3D printing This compact and highly dynamic 3-axis system is specially designed for 3D printing of delicate substrates.The customized print head on Z-axis moves extremely fast over the substrates. Due to the large travels up to 300 mm, high volumes can be achieved. For custom applications, the system can be adapted for a variety of carrier formats, samples and environmental conditions, each according to requirements. The gantry design makes it easy to integrate into cycle lines and to line up several such gantries. Ideal for flexible and automated 24/7 production Ideal for 3D printing for high-precision, universal additive manufacturing processes High throughput due to travels of 300 x 200 x 100 mm, expandable to 600 x 600 x 100 mm Two Z-axes for integration of two processes simultaneously like a second print head or for sensors for quality control Extremely high repeatability up to 0.4 µm for 3D printing Clean room compatible with high durability and long maintenance intervals Optionally expandable: Modular system configuration Expandable with up to five powerful secondary Z-axes for integrating additional print heads, cameras or sensors Inline inspection for quality assurance with additional sensors and cameras via the aluminum profile assembly behind the Z-axis Granite or aluminum base plate Safety cabinet Special configuration for biotechnology, medical technology, pharmaceuticals, semiconductors Customization for synthetic, biological or living samples Versions for clean room ISO 14644-1 (up to class 1 on request) Immediate use with pre-configured controller incl. exemplary software Reliable standard components with modern safety, documentation and control concepts The positioning system consists of the reliable linear stages of the PLT family, high-precision linear measuring systems and a modern motion control architecture. For decades, these components have met all requirements for accuracy and process reliability in different series. For documentation purposes, which are urgently required with the sensitive end product, the system is capable of logging, storing and outputting all operating and control parameters in real time with reference to the batch. This positioning system complies with the safety concept according to Performance Level e. Individual extensions and customizations Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests Fields of application Automation, Automated Industrial 3D Printing, Digital Printing, Additive Manufacturing, Prosthetics, lightweight design  
3D printing gantry (clean room) | XYZ positioning system for automated....  
High-precision 3D printing gantry system for the pharmaceutical industry This XYZ gantry system for the pharmaceutical industry is freely configurable in terms of number of axes, size and drive from the standard axes of the PLT series. This positioning system can thus be adapted to all printing tasks with extreme demands on accuracy and dynamics.Up to three customer-specific print heads can be adapted to the multiple crosshead for complex printing tasks. Optionally, the carriers can be equipped with cameras or sensors for integrated inline quality control.With submicron precision, you can print the spatial structure of a drug with high accuracy for immediate or delayed drug formulation and produce further individual combination preparations. Ideal for flexible and automated 24/7 production Ideal for pharmaceutical 3D printing with integrated quality controlThree freely configurable stages on the crosshead for individual printing and/or inspection taskHigh throughput due to traverse paths of 500 x 700 x 100 mm, expandable to 1000 mmVery high repeatability up to 0.4 µm for 3D printing Fully enclosed, pharma certified lubricants Chemical resistant, wipeable surfacesOptionally expandable:Expansion with additional Z-axes for the integration of further print heads, cameras or sensorsAdaptation of travel paths for the production areaSafety enclosureBase plate made of granite, aluminum or other materialsCustomization of the printing processVersions for clean room ISO 14644-1 (up to class 1 on request)Bus-capable fully interpolating industrial controller for integration into almost any automation environment Reliable standard components with modern safety, documentation and control concepts The positioning system consists of the reliable linear stages of the PLT family, high-precision linear measuring systems and a modern motion control architecture. For decades, these components have met all requirements for accuracy and process reliability in different series.For documentation purposes, which are urgently required with the sensitive end product, the system is capable of logging, storing and outputting all operating and control parameters in real time with reference to the batch.This positioning system fulfills the safety concept according to Performance Level e. Individual extensions and customizations Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests Fields of application 3D printing processes in the pharmaceutical industry, Automated 3D printing of tablets, polypills, medicines, drugs, microparticles, polylactides, polyvinyl alcohol and ethylene vinyl acetate, hydrogels, UV-curable resins, solutions, wet granules  
3D Pharma Printing Portal (clean room) | XYZ positioning system for....  
High-precision gantry for 3D printing in automated pharmaceutical production This XYZ positioning system is suitable for modular set-up and expansion of automated production lines in the pharmaceutical industry. The customer-specific print head on Z-axis moves extremely fast with up to 1000 mm/s over the carriers in the range of 300 x 200 mm. It is flexibly adaptable to different manufacturing technologies such as layer build-up, printing of microparticles or manufacturing by jets and much more. With sub-micron precision, you can print the spatial structure of a drug with high accuracy for immediate or delayed drug formulation and produce other customized combination preparations. Ideal for flexible and automated 24/7 production Ideal for 3D printing of extended-release tablets, polypills and combination productsTwo Z-axes for integration of two processes simultaneously for a second print head or for sensors for quality controlHigh throughput due travels of 300 x 200 x 100 mm, expandable to 600 x 600 x 100 mmExtremely high repeatability up to 0.4 µm for 3D printing Clean room compatible with long lifetime and long maintenance intervalsFlexible set-up and expansion of production lines due to easy integration into cycle lines and a modular baying of multiple gantriesOptionally expandable:Expansion with up to five powerful, secondary Z-axes for the integration of additional print heads, cameras or sensorsInline inspection for quality assurance with additional sensors and cameras via the aluminum probehind the Z axisAdaptation of the travels for the production spaceSafety cabinetBase plate made of granite or aluminumCustomer-specific adaptation of the printing processImmediate use with pre-configured controller incl. exemplary software Reliable standard components with modern safety, documentation and control concepts The positioning system consists of the reliable linear stages of the PLT family, high-precision linear measuring systems and a modern motion control architecture. For decades, these components have met all requirements for accuracy and process reliability in different series.For documentation purposes, which are urgently required with the sensitive end product, the system is capable of logging, storing and outputting all operating and control parameters in real time with reference to the batch.This positioning system complies with the safety concept according to Performance Level e. Individual extensions and customizations Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests Fields of application Automated 3D printing of tablets, polypills, drugs, pharmaceuticals, microparticles, polylactides, polyvinyl alcohol and ethylene vinyl acetate, hydrogels, UV-curable resins, solutions, wet granulates  
Measuring System for Pitch Errors of Ball Screw Drives(789595:006.26)  
This device is for measuring the pitch of ball screw drives. A linear scale with 1,26µm grating guaranties minimal cyclical error. A software combines the readings of the linear scale with the reading of a high resolution angular ring at the drive, hence enabling to plot the pitch error of the ball screw drive over the stroke in mounted condition.  

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Elger Matthes
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