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OEM Positioning Systems

Mirror Adjuster MT100-SM in the SUNRISE balloon carried...

… of application Aerospace, research, vacuum (HV, UHV), meology, linear actuators, mirror actuators...

rotary drive

… another stage attached to it. The unit is designed for UHV an is generally magnet-free. -...

Vacuum

LA97

…LA97-782457:005.24-Nanometer linear stage HV / UHV up to 10^-11, 100 - 300 mm avel, 0.02 µm...

LA92

…LA92-782475:037.26, 782475:028.26-High Speed Linear Axis HV / UHV / EUV, 40 mm avel, 0.4 µm...

MT105

… 782325:040.24-Customizable micro stage 10^ -11 HV / UHV / EUV, 30 - 100 mm avel, 0.4 µm...

LA170

…2475:031.26; 782475:033.26-Precise high load XYZ linear axis HV / UHV / EUV, 60 - 130 mm avel, 0.5...

LA80

…LA80-782475:038.26, 782475:049.26-High speed linear stage HV / UHV / EUV, 200 -500 mm avel, 0.4...

LT300

…-782475:035.26, 782475:006.26-Precise high load linear stage HV / UHV / EUV, 50 - 100 mm avel, 0.5...

LA85

…LA85-782447:010.26-Compact focus linear stage HV / UHV, 25 mm avel, 1.6 µm repeatability, 4 kg...

KLT300

…KLT300-782475:002.26-S high load xy stage HV / UHV / EUV, 10 mm avel, 80 mm aperture, 0.7 µm...

KDT105

…KDT105-782325:029.26-High resolution XY stage HV / UHV / EUV, 50 mm avel, 40 mm aperture, 0.3 µm...

KDT310

…KDT310-782330:032.26-Precise high load XY stage HV / UHV, 100 mm avel, 90 - 150 mm aperture, 0.7...

HT160

…HT160-782331:124.26-Precise high load vertical lifting stage HV / UHV / EUV, 16 mm avel, 1 µm...

HT240

…T240-782331:117.26-Precise high load vertical lifting stage HV / UHV / EUV, 25 mm avel, 1 µm...

HDT255

…HDT255-782475:013.14-High load aperture lifting HV / UHV / EUV, 16 mm Travel, 60 mm aperture, 1...

2LA95

…2LA95-782475:017.26-XZ system with piezo brake (UHV) UHV-system with 7 x 7 mm soke. Dry running,...

3LA170

…3LA170-782475:030.26-Heavy duty XYZ system (UHV) Heavy duty three axes manipulator for loads up to...

LA80-2LA95

…LA80-2LA95-782475:001.26-Fast 3-axis UHV system LA80-LA90 UV / UHV / EUV, max. 500 mm avel, 2 µm...

3LA95

…3LA95-782475:004.26-XYZ-System mit Piezobremse (UHV) Three coordinate manipulator with soke of 5 x...

sample fixation (non magnetic, UHV)

…sample fixation (non magnetic, UHV)-782442:002.26-In order to protect the delicate probe in its...

Coaxial rotary table with two rotation and longitudinal...

…Coaxial rotary table with two rotation and longitudinal movement (UHV)--This rather exotic UHV-asse...

camera manipulator

… ula high vacuum. Unbelievable but ue: Aramid ropes are UHV compatible! to project - Vakuum...

Polarization Transform

…Polarization Transform-782479:001.26-UHV mirror adjuster for Beamline This UHV positioning unit...

LA97-2MT85

…LA97-2MT85-782457:001.26-Ein UHV 3-Achs-System in magnetfreier Ausführung. Die Verfahrwege liegen...

MP53-3-PM

…MP53-3-PM-Art. ID 212382-High resolution micropositioner HV / UHV / EUV, 10 mm avel, 0.2 µm...

MP105-3

…MP105-3-782300:206.26-Fast, precise micropositioner HV / UHV / EUV, 20 - 50 mm avel, 0.2 µm...

Standard Axes & Stages

KDT180-NM

… motor, stepper motor or DC motor Vacuum version (HV / UHV) and non-magnetic variants available ...

KDT180-PM

… stepper motor or DC motor Vacuum version (HV / UHV) and non-magnetic variants available Fields...

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Laser und Röntgen

… und Serienfertigung im Bereich UV, UHV, EUV Lebensdauertests, Sicherheitskonzepte und...

Vacuum

… a wide range of solutions both for highly demanding UHV systems and for nonmagnetic assemblies. We...

Messtechnik

… High-End-Prototypen und Serienfertigung im Bereich UV, UHV, EUV Lebensdauertests, ...

Vacuum Technology

… Find the technically best positioning systems for UHV technology. Whether high-precision...

Application Areas

Wafer and Chip Inspection

… 5 nmunder extreme conditions HV, UHV, EUV, radiation or extreme...

Laboratory microscopy

… 5 nmunder extreme conditions HV, UHV, EUV, radiation or extreme...

www.steinmeyer-mechatronik.de

Medizin und Biotechnologie

… und Serienfertigung im Bereich UV, UHV, EUVLebensdauertests, Sicherheitskonzepte und Dokumentation...

Positioning Systems

Vacuum linear stages

… Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up...

Vacuum XY stages

… Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up...

Vacuum lifting stages

… Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up...

Vacuum Compact Multi Axes Systems

… Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up...

www.steinmeyer-mechatronik.de

Semiconductor Technology

… our proven solutions for demanding conditions such as HV, UHV and EUV für Restdrücke bis 10-12...

Company

Innovations time line

… remote maintenance options 2022 Highly compact 8-axis UHV mirror stage at SwissFEL Development...