MP105-3
Vacuum / Cleanroom compact multi axes systems & aligner
782300:206.26
Fast, precise micropositioner
HV / UHV / EUV, 20 - 50 mm travel, 0.2 µm repeatability, 1 kg load
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Optionally configurable:
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Miniaturized XYZ manipulator for high precision or dynamic applications
The manipulator is a highly dynamic 3-axis system for X, Y and Z movement in very limited installation space. Strokes up to 50 mm are realized. The manipulator is equipped with piezo motors and can thus realize positioning increments of a few nanometers for high-precision applications in high vacuum and ultra-high vacuum. Optionally equipped with a nanomotion, it is particularly suitable for highly dynamic and high-precision positioning.
Application areas
Precision positioning in very small spaces for laboratory applications, microscopy and semiconductor technology, research in ultra-high vacuum and under extreme ultraviolet radiation, sample preparation, sample scanning, sample handling, camera adjustment, sensor adjustment, materials research, materials analysis, beamline, accelerator, synchrotron, miniaturization
| MP105-3 | -50-50-50-PM-L | -50-50-20-2PM-L | -50-50-50-LM-L | -50-50-20-2LM-L | |||
| Travel X | [mm] | 50 | 50 | 50 | 50 | ||
| Travel Y | [mm] | 50 | 50 | 50 | 50 | ||
| Travel Z | [mm] | 50 | 20 | 50 | 20 | ||
| Repeatability unidirectional | [µm] | ± 0.2 | ± 0.2 | ± 0.4 | ± 0.4 | ||
| Repeatability bidirectional | [µm] | ± 0.3 | ± 0.3 | ± 0.5 | ± 0.5 | ||
| Positioning speed | [mm/s] | 5 | 5 | 50 | 20 | ||
| Max. load Fx | [N] | 5 | 5 | 5 | 5 | ||
| Max. load Fy | [N] | 5 | 5 | 5 | 5 | ||
| Max. load Fz | [N] | 5 | 10 | 5 | 10 | ||
| Feedback | Linear Scale | Linear Scale | Linear Scale | Linear Scale | |||
| Motor | Piezo Motor | Piezo Motor | Nanomotion | Nanomotion | |||
| Guide | Cross roller Stainless steel, hybrid, optional full ceramic | ||||||
| Length | [mm] | 155 | |||||
| Width | [mm] | 155 | |||||
| Height | [mm] | 195 | |||||
| Vacuum | [mbar] | up to 10-11 HV/UHV/EUV | |||||
| Lubrication liquic | [mbar] | up to 10-8 | |||||
| Lubrication dry | [mbar] | up to 10-11 | |||||
| Max. bakeout temperature | [deg] | 120 | |||||
| Magnetism Variants | magnetic | low-magnetic | magnet-free | ||||||
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