Micro stage with cross roller bearings and Piezo LEGS® motor for demanding environments.
Micro stage with high dynamics and speed
The MT105 is a micro stage for universal use characterized by its high dynamics and speed. Compared to its size, it has a large travel and very small step sizes thanks to the piezo motor.
Flexible and universal
The MT105 is equipped with precision cross roller bearings. It is possible to equip this micro stage with two motors for positioning higher loads, as an option. And the stage can be effortlessly com bined into an XYZ system.
Optimum for demanding environments
Challenging environments in research and development often require optional special solutions. The MT105 micro stage is designed to achieve outstanding processing and positioning accuracy under extreme conditions such as in high vacuum, ultra-high vacuum and even for non-magnetic applications.
|Repeatability unidirectional||[μm]||± 0.2||± 0.2||± 0.2|
|Repeatability bidirectional||[μm]||± 0.3||± 0.3||± 0.3|
|Accuracy||[μm]||± 1.2||± 1.4||± 1.9|
|Flatness||[μm]||± 1.5||± 2.5||± 5|
|Straightness||[μm]||± 1.1||± 1.8||± 3.5|
|Max. load Fx||[N]||10||10||10|
|Max. load Fy||[N]||55||55||55|
|Max. load Fz||[N]||55||55||55|
|Max. torque Mx||[Nm]||2||2||2|
|Max. torque My||[Nm]||0.9||0.9||0.9|
|Max. torque Mz||[Nm]||0.7||0.7||0.7|
|Pitch||[µrad]||± 55||± 70||± 100|
|Yaw||[µrad]||± 35||± 40||± 60|