Micro Stages

Micro stage with cross roller bearings and Piezo LEGS® motor for demanding environments.

Micro stage with high dynamics and speed

The MT105 is a micro stage for universal use characterized by its high dynamics and speed. Compared to its size, it has a large travel and very small step sizes thanks to the piezo motor.

Flexible and universal

The MT105 is equipped with precision cross roller bearings. It is possible to equip this micro stage with two motors for positioning higher loads, as an option. And the stage can be effortlessly com­ bined into an XYZ system.

Optimum for demanding environments

Challenging environments in research and development often re­quire optional special solutions. The MT105 micro stage is designed to achieve outstanding processing and positioning accuracy under extreme conditions such as in high vacuum, ultra-­high vacuum and even for non­-magnetic applications.

Modell MT105-30-2PM-L-50-PM-L-100-PM-L
Travel [mm] 3050100
Repeatability unidirectional [μm]± 0.2± 0.2± 0.2
Repeatability bidirectional [μm]± 0.3± 0.3± 0.3
Accuracy [μm]± 1.2± 1.4± 1.9
Flatness [μm]± 1.5± 2.5± 5
Straightness [μm]± 1.1± 1.8± 3.5
Positioning speed [mm/s]555
Max. acceleration [m/s2]
Max. load Fx[N]101010
Max. load Fy[N]555555
Max. load Fz[N]555555
Max. torque Mx[Nm]222
Max. torque My[Nm]
Max. torque Mz[Nm]
Pitch [µrad]± 55± 70± 100
Yaw [µrad]± 35± 40± 60
Resolution [µm]
Subject to change. Values ​​apply to single axes with our controllers.

Contact Person

Tobias Zilian

+49 (0) 30 67827660


Contact Person

Francisco Samuel

Tel.: +49 (0) 351 88585-85