Assembly System

782477:001.26

Here, the challenge was to positon two parts and once at positon keep them stable in place with nanometer stability. The solution is to have two traversal arms gliding on air bearings that each carry air bearing linear sliders with a z-stage and an small rotation unit. With this setup the two parts to be positioned can be moved by joystick to the desired position. Upon releasing the air form the bearings the system stands very stable for a long time. All parts are bilatal coated. Assembly was completed in clean room conditions.

Model 782477:001.26

X1,2

Y1,2

Z1,2

Rx

Ry

Hub

[mm; deg]

950

350

150

360

360

Accuracy

[µm; deg]

200

200

200

0.18

0.18

Stability

[µm]

0.05

0.05

0.05

 

 

Motor

SM

SM

SM

SM

SM

Drive

Riemen

Riemen

Ball Screw

Riemen

Riemen


Contact person for Machines

Dipl.-Ing. Reinhard Weihmann

Phone: +49 (0) 351 88585-35

Reinhard.Weihmann(at)steinmeyer.com