Sliding axes for the adjustment of two optics
Two lenses must be positioned relative to each other and also positioned together. Since the unit is exposed to stray radiation from the exposure process, lubrication must withstand these conditions in the long term. The basic solution consists of two sliding axes on a common guide system. Two moving sliding carriages have three carriages each, which allows them to move partially within each other in order to bring the lenses together as closely as possible. The drives consist of smoothened ball screw drives driven by a direct current motor with a rotary encoder. The motor encoder assembly is designed to be interchangeable for easy maintenance.
Designed for extremely dry environments
By choosing a PFPE-based lubricant and a special surface coating, the requirements for clean room compatibility and UV resistance were met. All accuracy-relevant parameters are verified by a measuring station after installation. This measuring station is located in the clean room and records accuracy, repeat accuracy, straightness, evenness and current consumption. Additional tests are performed to ensure minimum clearance in the bearing and smooth running of the drive system.