KT105
Vacuum / Cleanroom XY stages

782325:029.26 (without aperture)

High resolution XY stage

HV / UHV / EUV, 50 mm travel, 0.3 µm repeatability, 3 kg load

Vacuum: all ranges HV / UHV / EUV up to 10^-11 mbar

Lubrication liquid up to 10^-8 / dry up to 10^-11 mbar

Max. Bakeout temperature: 120°C

Clean room class 4 ISO 14644-1 (up to class 1 on request)

Optionally configurable:

With and without aperture
Available as magnetic, low-magnetic and magnet-free versions
Different motor variants: Nanomotion or piezo motor
Combinable with XYZ positioning system (e.g. MT105)
Combinable with rotary stages (e.g. DT105) for rotary applications
Optional with controller FMC400/450

Flexible XY stage with aperture

The XY stage with aperture and cross roller bearings offers high dynamics and speed for applications in high vacuum, ultra-high vacuum and under extreme ultraviolet radiation. Compared to its size, it enables very small step sizes. Equipped with a piezo motor, it achieves the smallest steps in the nanometer range with an almost unattainable position stability. With a nanomotion, it achieves very high dynamics as well as high speeds and has a maximum service life with precision in the micrometer range.

It can be easily combined with the MT105 lifting stage, thus offering many application possibilities.

Fields of application

Precision positioning for laboratory applications, microscopy and semiconductor technology, research in ultra-high vacuum and under extreme ultraviolet radiation, sample preparation, sample scanning, sample handling, biochips, wafer inspection, wafer alignment, camera adjustment, materials research, materials analysis, beamline, accelerator, synchrotron

Spezifikationen

KT105		-50-PM-L	-50-LM-L
Travel	[mm]	50 x 50	50 x 50
Repeatability unidirectional	[μm]	± 0.3	± 0.5
Repeatability bidirectional	[μm]	± 0.4	± 0.7
Positioning speed	[mm/s]	5	25
Max. speed	[mm/s]	10	50
Max. load Fx	[N]	5	4
Max. load Fy	[N]	5	4
Max. load Fz	[N]	45	45
Length	[mm]	150	0
Width	[mm]	150	0
Height	[mm]	50	0
Lubrication liquid	[mbar]	up to 10^-8
Lubrication dry	[mbar]	up to 10^-11
Max. Bakeout temperature	[deg]	120
Motor		Piezo Motor	Nanomotion
Bearing		cross roller bearings stainless steel, hybrid, optional full ceramic
Feedback		Linear Scale
Resolution Measuring system		0.1 µm, optional 0.001 µm
Optional features		With or without aperture, DT105 rotary stage, HT160 / MT105 Z-axis, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
Variants clean room		up to clean room class ISO 4 (higher on request)
Variants beam		UV, DUV, EUV (X-ray, gamma on request)
Variants Magnetism		magnetic, low-magnetic, magnet-free
Variants vacuum		all ranges up to 10E-11 mbar HV / UHV

Änderungen vorbehalten. Werte gelten für Einzelachsen mit unseren Controllern. Hier angegeben sind typische Werte für eine Standardausführung. Durch individuelle Anpassungen und bei genauer Kenntnis Ihrer Anwendung können deutlich verbesserte Werte erreicht werden.