MT105
Vacuum / Cleanroom linear stages and axes

782325:142.24, 782325:141.24, 782325:040.24
MT105 - Vacuum / Cleanroom linear stages and axes

 

Customizable micro stage

10^ -11 HV / UHV / EUV, 30 - 100 mm travel, 0.4 µm repeatability, 5 kg load

  • Vacuum: all ranges HV / UHV / EUV up to 10-11 mbar
  • Lubrication liquid up to 10-8 / dry up to 10-11 mbar
  • Max. Bakeout temperature: 120°C

Optionally configurable:

  • Available as magnetic, low magnetic and magnetic-free version
  • With up to 2 different motors for motion of high loads
  • Different motor variants: Nanomotion, piezo motor or linear motor
  • Combinable with the XYZ positioning system
  • Combinable with rotary tables (e.g. DT105) for rotary applications
  • Individual adaptation to the installation situation in the chamber
  • Version for clean room ISO 14644-1 (up to class 1 on request)
  • Optional with controller FMC400/450

    Flexible and universal for demanding environmental conditions

    The MT105 is a universally applicable micro stage that impresses above all with its high dynamics and speed. It is designed to achieve excellent running and positioning accuracies under extreme conditions, such as in high vacuum, ultra-high vacuum and for non-magnetic applications. Optionally, the micro stage can be equipped with two motors to position higher loads.

    Fields of application

    Semiconductor technology in ultra-high vacuum and under extreme ultraviolet radiation, wafer alignment, camera alignment, sensor alignment, bioprinting, high-throughput production of three-dimensional cell spheroids

    References

    Bioprinting-Based High-Throughput Fabrication of Three-Dimensional MCF-7 Human Breast Cancer Cellular Spheroids | Engineering (2015) Vol.1 Issue (2): 269-274 | https://www.engineering.org.cn/EN/10.15302/J-ENG-2015062

     

    MT105 -30-2PM-L-50-PM-L-100-PM-L-30-2NM-L-50-LM-L-100-LM-L
    Travel[mm]30501003050100
    Repeatability unidirectional[μm]± 0.2± 0.2± 0.2± 0.4± 0.4± 0.4
    Repeatability bidirectional[μm]± 0.3± 0.3± 0.3± 0.5± 0.5± 0.5
    Positioning speed[mm/s]555505050
    Max. speed[mm/s]7.57.57.5757575
    Max. load Fx[N]101010444
    Max. load Fy[N]555555555555
    Max. load Fz[N]555555555555
    Length[mm]152
    Width[mm]105
    Height[mm]25
    Lubrication liquid[mbar]up to 10-8
    Lubrication dry[mbar]up to 10-11
    Max. Bakeout temperature[deg]120
    Motor Piezo MotorPiezo Motor Piezo Motor Nanomotion Nanomotion Nanomotion 
    Bearing cross roller bearings stainless steel, hybrid, optional full ceramic
    Feedback Linear Scale
    Resolution Measuring system 0.1 µm, optional 0.005 µm 
    Optional features With up to 2 different motors for the motion of high loads, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
    Variants clean room  up to clean room class ISO 6 (higher on request)  
    Variants beam UV, DUV, EUV (X-ray, gamma on request)
    Variants Magnetism magnetic, low-magnetic, magnet-free
    Variants vacuum  all ranges up to 10E-11 mbar HV / UHV

     

    Your customized system

    201/5000 Even more axes for your vacuum applications:

    Even more axes for your vacuum applications?

    Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

    Dowload our product catalogue:

    Are you looking for a technical solution for your application?

    Get your first 3D Design in a few days:

     

    Elger Matthes
    Development, Consulting, Concepts, Innovationn

    T +49 (0) 351 88585-0
    E-mail