MT105
Vacuum / Cleanroom linear stages and axes
782325:142.24, 782325:141.24, 782325:040.24
Customizable micro stage
10^ -11 HV / UHV / EUV, 30 - 100 mm travel, 0.4 µm repeatability, 5 kg load
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Optionally configurable:
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Flexible and universal for demanding environmental conditions
The MT105 is a universally applicable micro stage that impresses above all with its high dynamics and speed. It is designed to achieve excellent running and positioning accuracies under extreme conditions, such as in high vacuum, ultra-high vacuum and for non-magnetic applications. Optionally, the micro stage can be equipped with two motors to position higher loads.
Fields of application
Semiconductor technology in ultra-high vacuum and under extreme ultraviolet radiation, wafer alignment, camera alignment, sensor alignment, bioprinting, high-throughput production of three-dimensional cell spheroids
References
Bioprinting-Based High-Throughput Fabrication of Three-Dimensional MCF-7 Human Breast Cancer Cellular Spheroids | Engineering (2015) Vol.1 Issue (2): 269-274 | https://www.engineering.org.cn/EN/10.15302/J-ENG-2015062
MT105 | -30-2PM-L | -50-PM-L | -100-PM-L | -30-2NM-L | -50-LM-L | -100-LM-L | |
Travel | [mm] | 30 | 50 | 100 | 30 | 50 | 100 |
Repeatability unidirectional | [μm] | ± 0.2 | ± 0.2 | ± 0.2 | ± 0.4 | ± 0.4 | ± 0.4 |
Repeatability bidirectional | [μm] | ± 0.3 | ± 0.3 | ± 0.3 | ± 0.5 | ± 0.5 | ± 0.5 |
Positioning speed | [mm/s] | 5 | 5 | 5 | 50 | 50 | 50 |
Max. speed | [mm/s] | 7.5 | 7.5 | 7.5 | 75 | 75 | 75 |
Max. load Fx | [N] | 10 | 10 | 10 | 4 | 4 | 4 |
Max. load Fy | [N] | 55 | 55 | 55 | 55 | 55 | 55 |
Max. load Fz | [N] | 55 | 55 | 55 | 55 | 55 | 55 |
Length | [mm] | 152 | |||||
Width | [mm] | 105 | |||||
Height | [mm] | 25 | |||||
Lubrication liquid | [mbar] | up to 10-8 | |||||
Lubrication dry | [mbar] | up to 10-11 | |||||
Max. Bakeout temperature | [deg] | 120 | |||||
Motor | Piezo Motor | Piezo Motor | Piezo Motor | Nanomotion | Nanomotion | Nanomotion | |
Bearing | cross roller bearings stainless steel, hybrid, optional full ceramic | ||||||
Feedback | Linear Scale | ||||||
Resolution Measuring system | 0.1 µm, optional 0.005 µm | ||||||
Optional features | With up to 2 different motors for the motion of high loads, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs | ||||||
Variants clean room | up to clean room class ISO 6 (higher on request) | ||||||
Variants beam | UV, DUV, EUV (X-ray, gamma on request) | ||||||
Variants Magnetism | magnetic, low-magnetic, magnet-free | ||||||
Variants vacuum | all ranges up to 10E-11 mbar HV / UHV |
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