LT300
Vacuum / Cleanroom linear stages and axes

782475:035.26, 782475:006.26
LT300 - Vacuum / Cleanroom linear stages and axes

 

Precise high load linear stage

HV / UHV / EUV, ISO 4, 50 - 100 mm travel, 0.5 µm repeatability, 10 kg load

  • Cleanroom: variants up to class ISO 4 (higher on request)
  • Vacuum: all ranges HV / UHV / EUV up to 10-11 mbar
  • Lubrication liquid up to 10-8 / dry up to 10-11 mbar
  • Max. Bakeout temperature: 120°C
  • Clean room class 4 ISO 14644-1 (up to class 1 on request)
  • Very long lifetime, even with dry running
Optionally configurable:
  • Available with piezo break
  • Material selection and vacuum lubrication adapted to the application
  • Individual adaptation to the installation situation in the chamber
  • Version for clean room ISO 14644-1 (up to class 1 on request)
  • Optional with controller FMC400/450

Stability in the nanometer range even high loads up to 10 kg

The linear stage is designed to position loads with high rigidity under extreme conditions, such as in high vacuum and ultra-high vacuum. Equipped with a piezoelectric caliper brake, this positioning system achieves stability in the nanometer range.

Fields of application

Semiconductor technology in ultra-high vacuum and under extreme ultraviolet radiation, wafer alignment, wafer inspection, camera alignment, sensor alignment, inspection of contacts, alignment of mirrors, probing, vacuum chambers, research, beamline instrumentation, electronics assembly and inspection, high-precision scanning applications

 

LT300 -50-SM-50-SM-L-100-SM-100-SM-L
Travel[mm]5050100100
Repeatability unidirectional[μm]± 2.9± 0.4± 2.9± 0.4
Repeatability bidirectional[μm]± 4± 0.5± 4± 0.5
Positioning speed[mm/s]5555
Max. speed[mm/s]10101010
Max. load Fx[N]44444444
Max. load Fy[N]44444444
Max. load Fz[N]120120120120
Length[mm]360360340340
Width[mm]300300300300
Height[mm]65656060
Lubrication liquid[mbar]up to 10-8   
Lubrication dry[mbar]up to 10-11   
Max. Bakeout temperature[deg]120 
Motor Stepper Motor  
Bearing cross roller bearings stainless steel, hybrid
Feedback Open LoopLinear ScaleOpen LoopLinear Scale
Resolution Measuring system 0.1 µm 0.1 µm
Optional features lead screw with dry lube or ball screw with liquid lube, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
Variants clean room up to clean room class ISO 6 (higher on request)
Variants beam UV, DUV, EUV (X-ray, gamma on request) 
Variants Magnetismmagnetic   
Variants vacuum  all ranges up to 10E-11 mbar HV / UHV 

 

Your customized system

201/5000 Even more axes for your vacuum applications:

Even more axes for your vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

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Elger Matthes
Development, Consulting, Concepts, Innovationn

T +49 (0) 351 88585-0
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