Stages and Axes

782475:031.26; 782475:033.26

Precise high load XYZ linear axis

HV / UHV / EUV, 60 - 130 mm travel, 0.5 µm repeatability, 20 kg load

  • Vacuum: all ranges HV / UHV / EUV up to 10-11 mbar
  • Lubrication liquid up to 10-8 / dry up to 10-11 mbar
  • Max. Bakeout temperature: 120°C
  • Available as magnetic version
Optionally configurable:
  • Material selection and vacuum lubrication adapted to the application
  • Individual adaptation to the installation situation in the chamber
  • Version for clean room ISO 14644-1 (up to class 1 on request)
  • Optional with controller FMC400/450

High precision positioning in X, Y and Z up to 20 kg

It is used as a powerful component for multi-axis systems as well as for scanning multiple samples simultaneously. It enables highly fine positioning with high loads in ultra-high vacuum, even in vertical direction.

Application areas

Setup of multi-axis systems, process automation, 3D scanning, sample scanning, positioning of imaging systems, microscopy, analysis of samples, semiconductor inspection, quality assurance in biotechnology and semiconductor technology, research, beamline, accelerator, synchrotron

Travel[mm] 6060130130
Repeatability bidirectional[µm]± 4± 0.5± 4

± 0.5

Positioning Speed[mm/s]5555
Max. Load Fx[N]196196196196
Max. Load Fy[N]196196196196
Max. Load Fz[N]196196196196
Vacuum[mbar]up to 10-11  HV/UHV
Lubrication liquid[mbar]up to 10-8
Lubrication dry[mbar]up to 10-11
Max. Bakeout temperature[deg]120
Magnetism Versionsmagnetic
MotorStepper Motor
Guidecross roller bearings stainless steel, hybrid
FeedbackOpen LoopLinear ScaleOpen LoopLinear Scale


Specifications are subject to change. Values are for the single axis with our controller. Parameters shown here are typical values for a standard configuration. By customization and given in depth knowledge of your application significantly improved values can be achieved.

    1. Your customized system

    1. Your contact details
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201/5000 Even more axes for your vacuum applications:

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6mba - or even better - available. Click here for the overview of our standard axes!

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Are you looking for the best technical solution? Get in touch with us:

Dipl.-Ing. Elger Matthes

Phone: +49 (0) 351 88585-0