KDT310-SM-HV
Vacuum / Cleanroom XY stages
782330:032.26
Heavy load XY scanning stage
HV, DUV, Cleanroom ISO 6, 100 mm travel, travel 100 x 100 mm, rep up to 0.7 µm, speed 20 mm/s, load 20 kg
|
|
|
|
|
Optionally configurable:
|
Highly loadable XY aperture system
The positioning system with aperture was combined from two linear stages to design a precise and heavy-duty XY stage for applications in high vacuum and ultra-high vacuum. Its concept with profile rail guides and high-precision ball screws enables outstanding precision with optimum use of the installation space.
It can be easily combined with the DT155 rotary stage, resulting in a wide range of applications.
Fields of application
Precision positioning for laboratory applications, microscopy and semiconductor technology, research in ultra-high vacuum and under extreme ultraviolet radiation, sample preparation, sample scanning, sample handling, biochips, wafer inspection, wafer alignment, camera adjustment, materials research, materials analysis, beamline, accelerator, synchrotron
| KDT310 | -100-SM | -100-SM-L | |
| Standard System | LT310 | LT310 | |
| Travel | [mm] | 100 x 100 | 100 x 100 |
| Repeatability unidirectional | [μm] | ± 1.6 | ± 0.7 |
| Repeatability bidirectional | [μm] | ± 2.1 | ± 0.5 |
| Positioning speed | [mm/s] | 10 | 10 |
| Max. speed | [mm/s] | 20 | 20 |
| Max. load Fx | [N] | 196 | 196 |
| Max. load Fy | [N] | 196 | 196 |
| Length | [mm] | 310 | 310 |
| Width | [mm] | 310 | 310 |
| Height | [mm] | 100 | 100 |
| Aperture X | [mm] | 90 x 90 | |
| Aperture Y | [mm] | 150 x 150 | |
| Weight | [kg] | 17 | |
| Lubrication liquid | [mbar] | up to 10-8 | |
| Max. Bakeout temperature | [deg] | 100 | |
| Drive | Ball Screw 1214.545/1.8.138.188R P3P | ||
| Screw lead | 1 | ||
| Bearing | profile rail | ||
| Motor | Stepper Motor | ||
| Feedback | Open Loop | Linear Scale | |
| Resolution measuring system | without | 0.05 µm, optional up to 0.001 µm | |
| Optional features | Lead screw with dry lube or ball screw with liquid lube, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs | ||
| Variants clean room | up to clean room class ISO 6 (higher on request) | ||
| Variants beam | UV, DUV (EUV, X-ray, gamma on request) | ||
| Variants magnetism | magnetic | ||
| Variants vacuum | all ranges up to 10E-8 mbar HV | ||
Related Products
201/5000 Even more axes for your vacuum applications:
Even more axes for your vacuum applications?
Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!
Dowload our product catalogue:
