KT105
Vacuum / Cleanroom XY stages
782325:029.26 (without aperture)
High resolution XY stage
HV / UHV / EUV, 50 mm travel, 0.3 µm repeatability, 3 kg load
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Optionally configurable:
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Flexible XY stage with aperture
The XY stage with aperture and cross roller bearings offers high dynamics and speed for applications in high vacuum, ultra-high vacuum and under extreme ultraviolet radiation. Compared to its size, it enables very small step sizes. Equipped with a piezo motor, it achieves the smallest steps in the nanometer range with an almost unattainable position stability. With a nanomotion, it achieves very high dynamics as well as high speeds and has a maximum service life with precision in the micrometer range.
It can be easily combined with the MT105 lifting stage, thus offering many application possibilities.
Fields of application
Precision positioning for laboratory applications, microscopy and semiconductor technology, research in ultra-high vacuum and under extreme ultraviolet radiation, sample preparation, sample scanning, sample handling, biochips, wafer inspection, wafer alignment, camera adjustment, materials research, materials analysis, beamline, accelerator, synchrotron
| KT105 | -50-PM-L | -50-LM-L | ||
| Travel | [mm] | 50 x 50 | 50 x 50 | |
| Repeatability unidirectional | [μm] | ± 0.3 | ± 0.5 | |
| Repeatability bidirectional | [μm] | ± 0.4 | ± 0.7 | |
| Positioning speed | [mm/s] | 5 | 25 | |
| Max. speed | [mm/s] | 10 | 50 | |
| Max. load Fx | [N] | 5 | 4 | |
| Max. load Fy | [N] | 5 | 4 | |
| Max. load Fz | [N] | 45 | 45 | |
| Length | [mm] | 150 | 0 | |
| Width | [mm] | 150 | 0 | |
| Height | [mm] | 50 | 0 | |
| Lubrication liquid | [mbar] | up to 10-8 | ||
| Lubrication dry | [mbar] | up to 10-11 | ||
| Max. Bakeout temperature | [deg] | 120 | ||
| Motor | Piezo Motor | Nanomotion | ||
| Bearing | cross roller bearings stainless steel, hybrid, optional full ceramic | |||
| Feedback | Linear Scale | |||
| Resolution Measuring system | 0.1 µm, optional 0.001 µm | |||
| Optional features | With or without aperture, DT105 rotary stage, HT160 / MT105 Z-axis, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs | |||
| Variants clean room | up to clean room class ISO 4 (higher on request) | |||
| Variants beam | UV, DUV, EUV (X-ray, gamma on request) | |||
| Variants Magnetism | magnetic, low-magnetic, magnet-free | |||
| Variants vacuum | all ranges up to 10E-11 mbar HV / UHV | |||
201/5000 Even more axes for your vacuum applications:
Even more axes for your vacuum applications?
Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!
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