HT160
Vacuum / Cleanroom lifting stages
782331:124.26
Precise vertical lifting stage
UHV, DUV / EUV, cleanroom ISO 4, travel 16 mm, rep 1 µm, load 5 kg
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Precise lifting stage for high loads
The lifting stage is suitable for high-precision vertical movements under extreme conditions, such as in high vacuum, ultra-high vacuum. Due to its lift-wedge principle, it achieves its parameters despite its low overall height. The combination of gearmotors and a precise ball screw, optional lead screw, enables smallest step sizes at comparatively high loads.
Application areas
Precision positioning in industry and research in ultra-high vacuum and under extreme ultraviolet radiation, wafer alignment, camera alignment, materials research, materials analysis, microscopy in vacuum, beamline, accelerator, synchrotron
| 782331:124.26 | -SM | -SM-L | |
| Travel | [mm] | 16 | 16 |
| Repeatability unidirectional | [μm] | ± 1.7 | ± 1 |
| Repeatability bidirectional | [μm] | ± 2.7 | ± 2 |
| Positioning speed | [mm/s] | 1.1 | 1.1 |
| Max. speed | [mm/s] | 2.2 | 2.2 |
| Max. load Fx | [N] | 50 | 50 |
| Max. load Fy | [N] | 50 | 50 |
| Max. load Fz | [N] | 45 | 45 |
| Length | [mm] | 348 | 348 |
| Width | [mm] | 154 | 154 |
| Height | [mm] | 58 | 58 |
| Weight | [kg] | 5 | 5 |
| Drive | 1214.559/1.8.88.124R P3P | ||
| Lubrication liquid | [mbar] | up to 10-9 | |
| Lubrication dry | [mbar] | up to 10-9 | |
| Max. Bakeout temperature | [deg] | 120 | |
| Motor | Stepper Motor | ||
| Bearing | cross roller bearings stainless steel, hybrid | ||
| Feedback | Open Loop | Linear Scale | |
| Resolution Measuring system | - | 0.1 µm, optional up to 0.001 µm | |
| Optional features | wedge with ball screw or lead screw with dry lube, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs | ||
| Variants clean room | up to clean room class ISO 4 (higher on request) | ||
| Variants beam | UV, DUV, EUV (X-ray, gamma on request) | ||
| Variants magnetism | magnetic | ||
| Variants vacuum | all ranges up to 10E-9 mbar HV / UHV | ||
201/5000 Even more axes for your vacuum applications:
Even more axes for your vacuum applications?
Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!
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