HDT255
Vacuum / Cleanroom lifting stages
782475:013.14
Aperture lifting stage
UHV, DUV / EUV, ISO 6, travel 16 mm, rep 0.7 µm, 10 kg load, speed 16 mm/s
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Optionally configurable:
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Precise lifting stage for high loads
The lifting stage with aperture is suitable for high-precision vertical movements under extreme conditions, such as in high vacuum, ultra-high vacuum and under extreme ultraviolet radiation. Due to its lift-wedge principle, it achieves its parameters despite a low overall height of 125 mm. The combination of stepper motor and a precise ball screw, optionally sliding screw, allows smallest step sizes at comparatively high loads.
Application areas
Fields of application
Precision positioning in industry and research in ultra-high vacuum and under extreme ultraviolet radiation, alignment and inspection of wafers, probe cards and printed circuit boards, surface analysis, layer thickness measurement, camera alignment, materials research, materials analysis, inspection, microscopy in vacuum, beamline, accelerator, synchrotron
| HDT255 | -SM | -SM-L | |
| Travel | [mm] | 16 | 16 |
| Repeatability unidirectional | [μm] | ± 2.9 | ± 0.7 |
| Repeatability bidirectional | [μm] | ± 4 | ± 1 |
| Positioning speed | [mm/s] | 8.3 | 8.3 |
| Max. speed | [mm/s] | 16.6 | 16.6 |
| Max. load Fx | [N] | 98 | 98 |
| Max. load Fy | [N] | 98 | 98 |
| Max. load Fz | [N] | 98 | 98 |
| Length | [mm] | 410 | 410 |
| Width | [mm] | 225 | 225 |
| Height | [mm] | 125 | 125 |
| Aperture | [mm] | 60 x 60 | |
| Weight | [kg] | 11 | |
| Lubrication liquid | [mbar] | up to 10-8 | |
| Lubrication dry | [mbar] | up to 10-11 | |
| Max. Bakeout temperature | [deg] | 120 | |
| Motor | Stepper Motor | ||
| Bearing | cross roller bearings stainless steel, hybrid | ||
| Feedback | Open Loop | Linear Scale | |
| Resolution Measuring system | - | 0.1 µm | |
| Optional features | With or without aperture, lead screw or ball screw, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs | ||
| Variants cleanroom | up to cleanroom class ISO 6 (higher on request) | ||
| Variants beam | UV, DUV, EUV (X-ray, gamma on request) | ||
| Variants magnetism | magnetic | ||
| Variants vacuum | all ranges up to 10E-11 mbar HV / UHV | ||
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