HDT255
Vacuum / Cleanroom lifting stages

782475:013.14
HDT255 - Vacuum / Cleanroom lifting stages

 

Aperture lifting stage

UHV, DUV / EUV, ISO 6, travel 16 mm, rep 0.7 µm, 10 kg load, speed 16 mm/s

  • Cleanroom: variants up to class ISO 6 (higher on request)
  • Vacuum: all ranges HV / UHV up to 10-11 mbar
  • Lubrication liquid up to 10-8 mbar / dry up to 10-11 mbar
  • Max. Bakeout temperature: 120°C
Optionally configurable:
  • With or without aperture
  • Optionally with and without measuring system
  • Material selection and lubrication adapted to the application
  • Optionally with controller FMC400/450
  • Customized development with 3D design, prototypes, series production

Precise lifting stage for high loads

The lifting stage with aperture is suitable for high-precision vertical movements under extreme conditions, such as in high vacuum, ultra-high vacuum and under extreme ultraviolet radiation. Due to its lift-wedge principle, it achieves its parameters despite a low overall height of 125 mm. The combination of stepper motor and a precise ball screw, optionally sliding screw, allows smallest step sizes at comparatively high loads.
Application areas
 

Fields of application

Precision positioning in industry and research in ultra-high vacuum and under extreme ultraviolet radiation, alignment and inspection of wafers, probe cards and printed circuit boards, surface analysis, layer thickness measurement, camera alignment, materials research, materials analysis, inspection, microscopy in vacuum, beamline, accelerator, synchrotron

 

HDT255 -SM-SM-L
Travel[mm]1616
Repeatability unidirectional[μm]± 2.9± 0.7
Repeatability bidirectional[μm]± 4± 1
Positioning speed[mm/s]8.38.3
Max. speed[mm/s]16.616.6
Max. load Fx[N]9898
Max. load Fy[N]9898
Max. load Fz[N]9898
Length[mm]410410
Width[mm]225225
Height[mm]125125
Aperture[mm]60 x 60
Weight[kg]11
Lubrication liquid[mbar]up to 10-8
Lubrication dry[mbar]up to 10-11
Max. Bakeout temperature[deg]120
Motor Stepper Motor
Bearing cross roller bearings stainless steel, hybrid
Feedback Open Loop Linear Scale
Resolution Measuring system-0.1 µm
Optional features With or without aperture, lead screw or ball screw, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
Variants cleanroom up to cleanroom class ISO 6 (higher on request)
Variants beam UV, DUV, EUV (X-ray, gamma on request)
Variants magnetismmagnetic
Variants vacuum  all ranges up to 10E-11 mbar HV / UHV

 

Änderungen vorbehalten. Werte gelten für Einzelachsen mit unseren Controllern. Hier angegeben sind typische Werte für eine Standardausführung. Durch individuelle Anpassungen und bei genauer Kenntnis Ihrer Anwendung können deutlich verbesserte Werte erreicht werden.

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Elger Matthes
Entwicklung, Beratung, Konzepte, Innovation

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