Stages and Axes


High precision rotary stage

HV, n x 360°, 0.003° repeatability, 0.5 kg load

  • Vacuum: all ranges HV up to 10-8 mbar
  • Lubrication liquid up to 10-8 mbar
  • Max. Bakeout temperature: 100°C
Optionally configurable:
  • Magnetic and low magnetic variants available
  • Material selection and vacuum lubrication adapted to the application
  • Individual adaptation to the installation situation in the chamber
  • Version for clean room ISO 14644-1 (up to class 1 on request)
  • Optional with controller FMC400/450

Small, highly dynamic rotary stage

The smallest vacuum rotation stage in the product portfolio impresses with its high dynamics and speed. In vacuum and low-magnetic design, the DT65 is perfectly suited for applications in demanding environments. It is therefore used in particular in research and development as well as in experimental physics. It can be combined into demanding multi-axis systems and can be easily controlled via our FMC 400/450 controllers.

Fields of application

Research and development, setup of multi-axis systems, beamline instrumentation, synchrotron, materials research, materials analysis, wafer inspection, semiconductor quality control, semiconductor research

Travel[deg] n x 360
Repeatability unidirectional[deg]± 0.003
Repeatability bidirectional[deg]± 0.006
Positioning speed[deg/s]360
Max. load [N]10
Guidestainless steel
FeedbackLinear Scale
Vacuum[mbar]up to 10-8  HV
Lubrication liquid[mbar]up to 10-8
Max. bakeout temperature[deg]100
Magnetism Versionsmagnetic | low-magnetic


Specifications are subject to change. Values are for the single axis with our controller. Parameters shown here are typical values for a standard configuration. By customization and given in depth knowledge of your application significantly improved values can be achieved.

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201/5000 Even more axes for your vacuum applications:

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6mba - or even better - available. Click here for the overview of our standard axes!

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Are you looking for the best technical solution? Get in touch with us:

Dipl.-Ing. Elger Matthes

Phone: +49 (0) 351 88585-0