DT65
Vacuum / Cleanroom rotary stages
782326:011.24
Highly dynamic rotary stage
HV / UHV, DUV, Cleanroom ISO 6, unlimited travel, rep up to 0.003°, speed up to 540°/s, load up to 1 kg
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Optionally configurable:
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Small, highly dynamic rotary stage
The smallest vacuum rotation stage in the product portfolio impresses with its high dynamics and speed. In vacuum and low-magnetic design, the DT65 is perfectly suited for applications in demanding environments. It is therefore used in particular in research and development as well as in experimental physics. It can be combined into demanding multi-axis systems and can be easily controlled via our FMC 400/450 controllers.
Fields of application
Research and development, setup of multi-axis systems, beamline instrumentation, synchrotron, materials research, materials analysis, wafer inspection, semiconductor quality control, semiconductor research
DT65 | -1NM-W | |
Travel | [deg] | nx360 |
Repeatability unidirectional | [deg] | ± 0.003 |
Repeatability bidirectional | [deg] | ± 0.006 |
Positioning speed | [deg/s] | 360 |
Max. speed | [deg/s] | 540 |
Max. acceleration | [deg/s2] | 20000 |
Max. load Fz | [N] | 10 |
Max. torque Mx | [Nm] | 3.3 |
Max. torque My | [Nm] | 3.3 |
Max. torque Mz | [Nm] | 0.25 |
Length | [mm] | 106 |
Width | [mm] | 65 |
Height | [mm] | 30 |
Turntable | [mm] | Ø 65 |
Aperture (optional) | [mm] | Ø 14 |
Lubrication liquid | [mbar] | up to 10-8 |
Lubrication dry | [mbar] | up to 10-11 |
Max. Bakeout temperature | [deg] | 100 |
Bearing | 2 Thin-section bearings | |
Motor | Nanomotion (Piezo) | |
Feedback | Angular Scale | |
Resolution Measuring system | 0.001 deg | |
Optional features | With or without aperture, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs | |
Variants cleanroom | up to clean room class ISO 6 (higher on request) | |
Variants beam | UV, DUV (EUV, X-ray, gamma on request) | |
Variants magnetism | magnetic, low-magnetic (magnet-free on request) | |
Variants vacuum | all ranges up to 10E-11 mbar HV / UHV (higher in request) |
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